Innovative design and modelling of a micromechanical relay with electrostatic actuation

Sattler, R.; Voigt, P.; Pradel, Helmut; Wachutka, G.

doi:10.1088/0960-1317/11/4/325

Cited by 19 publications

(18 citation statements)

References 20 publications

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“…It is therefore required implementing effective numerical models to predict the electromechanical behaviour of microstructures actuated by the electric field, as stand-alone systems or as structural components of assembled microdevices. Electromechanical coupling makes this prediction rather difficult, because of the interaction between electrical and mechanical domains, thus requiring a coupled-field analysis, which includes some nonlinearities [14][15][16][17][18][19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

FEM modelling and experimental characterization of microbeams in presence of residual stress

Ballestra

Brusa

Pasquale

et al. 2009

Analog Integr Circ Sig Process

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Out-of-plane bending tests are here used to experimentally validate some numerical models of microbeams actuated by the electric field. Out-of-plane bending microcantilevers and clamped-clamped microbeams often suffer the presence of residual strain and stress, respectively, which affect their static and dynamic behaviour and pull-in voltage. In case of microcantilever an accurate modelling has to include the effect of an initial curvature due to microfabrication process, while in double clamped microbeams constraints may impose a pre-loading caused by a tensile stress. So-called geometrical nonlinearity sometimes occurs, when microcantilever exhibits large displacement, or because of the mechanical coupling between axial and flexural behaviours in double clamped microbeams. Modelling this kind of nonlinearity is an additional goal of this study. Experiments demonstrated a good agreement with results of FEM approaches proposed. In the case of microbridges numerical models are used to identify the residual stress. A reverse analysis is implemented, the axial pre-stress is calculated by means of the measured pull-in voltage.

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Section: Introductionmentioning

confidence: 99%

FEM modelling and experimental characterization of microbeams in presence of residual stress

Ballestra

Brusa

Pasquale

et al. 2009

Analog Integr Circ Sig Process

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“…They found that in order to the lateral deflection is strongly FIGURE 4.31. The effect of stress gradient on the contact force of a RF switch [201].…”

Section: Residual Stress Gradient Characterizationmentioning

confidence: 99%

“…In order to obtain accurate prediction, 3D FEM analyses are usually used associated with experimental data. Sattler et al [201] investigated the influence of the existence of residual stress gradient to a RF MEMS switch using CoSolve module of MEMCAD [202]. The initial curvature caused by the stress gradient would effectively change the contact force of the switch.…”

Section: Residual Stress Gradient Characterizationmentioning

confidence: 99%

Techniques in Residual Stress Measurement for MEMS and Their Applications

Chen

Mems/Nems

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This chapter mainly focuses on the introduction of residual stress characterization of MEMS materials. The origin and classification of residual stress appearing in thin films and MEMS structures are firstly introduced and the essential background of necessary mechanics, which is utilized to convert the measured data into the final residual stress, is followed. Various types of residual stress characterization techniques conducted in MEMS scale are subsequently addressed and reviewed. Finally, a brief discuss on controlling residual stresses and on taking the advantage of residual stress in MEMS applications is briefly discussed.

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“…where L is the length of the cantilever, and B is the peak-to-valley bow [39]. In order to analyze the beams, the stress states before release, directly after release, and after the beams bend must be taken into consideration.…”

Section: Beam Theory: Cantilever Beamsmentioning

confidence: 99%

Ultra-lightweight telescope with MEMS adaptive optic for distortion correction.

Spahn¹,

Cowan²,

Shaw³

et al. 2004

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DO NOT DESTROY RETURN TO LIBRARY VAULTABSTRACT Recent world events have underscored the need for a satellite based persistent global surveillance capability. To be useful, the satellite must be able to continuously monitor objects the size of a person anywhere on the globe and do so at a low cost.One way to satisfy these requirements involves a constellation of satellites in low earth orbit capable of resolving a spot on the order of 20 cm. To reduce cost of deployment, such a system must be dramatically lighter than a traditional satellite surveillance system with a high spatial resolution. The key to meeting this requirement is a lightweight optics system with a deformable primary and secondary mirrors and an adaptive optic subsystem correction of wavefront distortion. This proposal is concerned with development of MEMS micromirrors for correction of aberrations in the primary mirror and improvement of image quality, thus reducing the optical requirements on the deployable mirrors. To meet this challenge, MEMS micromirrors must meet stringent criteria on their performance in terms of flatness, roughness and resolution of position. Using Sandia's SUMMIT foundry which provides the world's most sophisticated surface MEMS technology as well as novel designs optimized by finite element analysis will meet severe requirements on mirror travel range and accuracy.

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Innovative design and modelling of a micromechanical relay with electrostatic actuation

Cited by 19 publications

References 20 publications

FEM modelling and experimental characterization of microbeams in presence of residual stress

FEM modelling and experimental characterization of microbeams in presence of residual stress

Techniques in Residual Stress Measurement for MEMS and Their Applications

Ultra-lightweight telescope with MEMS adaptive optic for distortion correction.

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