Innovative Nanoimprint-Assisted Fabrication of Anodic Aluminum Oxide

Abstract

Anodic aluminum oxide (AAO) templates possess highlyordered nanoporous structures, with advantages such as high aspect ratio. However, there are limits to control the growth of the traditional AAO arrays, such as interpore distance, pore sizes and densities. In this study, we introduce an innovative nanoimprint process guided AAO fabrication to overcome these limitations of the traditional AAO arrays.