Inorganic–organic hybrid polymer optical planar waveguides for micro-opto-electro-mechanical systems (MOEMS)

Optical Polymer Waveguides Fabricated by Roll-to-Plate Nanoimprinting Technique

“…Transmission spectra measurement shows that UV-curable inorganic-organic hybrid polymer OrmoClear ® FX core layer is transparent in the whole measured spectral range from the visible to near-infrared spectrum (250-1750 nm). The measurement showed that this polymer has suitable properties as an optical waveguide core material and this result is also in good agreement with our previously published results in [12].…”

“…Therefore, OrmoClear ® FX hybrid polymer is a suitable candidate for the core layer with a combination Lumogen OVD Varnish 311 cladding layer. Our measured values of the refractive indices of OrmoClear ® FX were also in good agreement with our previously published data and data provided by supplier micro resist technology GmbH [12]. OrmoClear ® FX hybrid polymer used for the core layer has a higher value of the refractive index (n = 1.5409@ 1308.2 nm, 1.5388@ 1549.1 nm) compared to other optical polymers for example siloxane optical LIGHTLINK™ XP-6701A polymer (n = 1.505@ 1308.2 nm) or polydimethylsiloxane elastomers Sylgard 184 (n = 1.403@ 1308.2 nm) and NuSil Technology LS-6943 (n = 1.418@ 1308.2 nm).…”

“…The refractive indices of the used polymers were measured by dark mode spectroscopy using six wavelengths: 532.0, 654.2, 846.4, 1308.2, 1549.1 and 1652.1 nm. The principle of the method has been already described in [ 12 ] and the measured results are shown in Figure 5 b.…”

“…Therefore, in the last decades, new types of polymers for optics and photonics applications were developed in many laboratories worldwide and some of them are commercially available [ 4 , 5 ]. These polymers include siloxane LIGHTLINK™ XP-6701A core, LIGHTLINK™ XH-100145 clad [ 6 ], UV-curable epoxy polymers Su-8, EpoCore/EpoClad [ 7 , 8 , 9 ], benzocyclobutene (Dow Chemical, Midland, MI, USA) [ 10 ], ZPU resin and polymers (ChemOptics Inc., Daejeon, South Korea) [ 11 ], inorganic–organic hybrid polymers OrmoClear ® FX (micro resist technology GmbH), SUNCONNECT (Nissan Chemical Ltd., Tokyo, Japan) [ 12 , 13 ], UV exposure optical elastomer OE-4140 core, OE-4141 cladding (Dow Corning, Midland, MI, USA) [ 14 ], Truemode Backplane Polymer (Exxelis, Ltd., Washington, DC, USA) [ 15 ], polydimethylsiloxane Sylgard 184, LS-6943 [ 16 , 17 ] and etc. [ 4 , 5 ].…”

SiO2 Nanoparticles-Acrylate Formulations for Core and Cladding in Planar Optical Waveguides

“…The refractive indices of core and cladding polymers are tuned by changing the polymer chemical composition. Organic or hybrid polymers are usually used as waveguiding materials [ 11 , 14 , 15 , 16 , 17 , 18 ]. However, the refractive indices of Ormocer hybrid polymers are usually higher than 1.5 [ 14 , 15 , 17 ].…”