2006
DOI: 10.1002/pssc.200564169
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InP double‐hetero bipolar transistor technology for 130 GHz clock speed

Abstract: PACS 84.40. Dc, 84.40.Lj, 85.30.Pq Indium Phosphide-based Hetero Bipolar Transistors (HBTs) have shown strong potential for mm-wave power electronics and mixed-mode applications beyond 100 GHz clock speed. We have developed a planar fabrication technology using all dry etched mesas, which scales to 0.25 µm emitter size. Devices show cut-off frequencies of f t = 380 GHz and f max = 380 GHz simultaneously (optimized for highest f max ) or f t = 410 GHz and f max = 340 GHz (optimized for f t ). As technology t… Show more

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Cited by 9 publications
(2 citation statements)
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“…For high-performance devices with a 0.5 ϫ 4 mm 2 emitter size, seen in Figure 5, we replace yield-limiting wet etch steps and emitter-metal lift-off with dry etch by inductively coupled plasma [28]. Furthermore, i-line stepper lithography is used on the 3 inch substrates throughout the entire process flow.…”
Section: Process Technologymentioning
confidence: 99%
“…For high-performance devices with a 0.5 ϫ 4 mm 2 emitter size, seen in Figure 5, we replace yield-limiting wet etch steps and emitter-metal lift-off with dry etch by inductively coupled plasma [28]. Furthermore, i-line stepper lithography is used on the 3 inch substrates throughout the entire process flow.…”
Section: Process Technologymentioning
confidence: 99%
“…It is indeed the advancement in understanding epitaxial growth and developing epitaxial growth techniques in the past several decades that has been enabling impressive and continuous developments of functional devices such as hetero-bipolar transistors [4], light emitting diodes [5], laser diodes [6], photodetectors [7], and photovoltaic devices [8] in microelectronics and optoelectronics in either commercial products being rolled out from industries or research topics inspiring laboratories. Epitaxy and resulting single-crystal films apparently contribute to a core of many important scientific and technological fields.…”
Section: Introductionmentioning
confidence: 99%