Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage

Wang, Hua; Zhang, Xianmin

doi:10.1016/j.mechmachtheory.2007.04.009

Cited by 155 publications

(73 citation statements)

References 16 publications

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“…Therefore, flexure hinges are widely used in translation micropositioning stages, scanning tunneling microscopes, high-precision cameras, robotic microdisplacement mechanisms, and especially in micro-electromechanical systems (MEMSs). [3][4][5] In 1965, Paros and Weisbord 6 first proposed design equations for the circular flexure hinges, both exact and simplified, which are derived for calculating the compliances of single-axis and two-axes circular-cutout constant cross section flexure hinges. Then, right circular flexure hinges were extensively employed in compliant mechanisms.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of a high-accuracy flexure hinge

Liu

Zhang

Fatikow

2016

Review of Scientific Instruments

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This paper designs and analyzes a new kind of flexure hinge obtained by using a topology optimization approach, namely, a quasi-V-shaped flexure hinge (QVFH). Flexure hinges are formed by three segments: the left and right segments with convex shapes and the middle segment with straight line. According to the results of topology optimization, the curve equations of profiles of the flexure hinges are developed by numerical fitting. The in-plane dimensionless compliance equations of the flexure hinges are derived based on Castigliano's second theorem. The accuracy of rotation, which is denoted by the compliance of the center of rotation that deviates from the midpoint, is derived. The equations for evaluating the maximum stresses are also provided. These dimensionless equations are verified by finite element analysis and experimentation. The analytical results are within 8% uncertainty compared to the finite element analysis results and within 9% uncertainty compared to the experimental measurement data. Compared with the filleted V-shaped flexure hinge, the QVFH has a higher accuracy of rotation and better ability of preserving the center of rotation position but smaller compliance. Published by AIP Publishing. [http://dx

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Section: Introductionmentioning

confidence: 99%

Design and analysis of a high-accuracy flexure hinge

Liu

Zhang

Fatikow

2016

Review of Scientific Instruments

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“…Planar monolithic 3 DoF stages were found in Lu et al (2004), Ryu et al (1997), Tian et al (2010), Wang and Zhang (2008), and Yi et al (2003). The circular notch flexure groups are arranged 120…”

Section: Planar Compliant Stagesmentioning

confidence: 93%

Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

2011

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Abstract. For many applications in precision engineering, a six degrees of freedom (DoF) compliant stage (CS) with zero stiffness is desirable, to deal with problems like backlash, friction, lubrication, and at the same time, reduce the actuation force. To this end, the compliant stage (also known as compliant mechanism) can be statically balanced with a stiffness compensation mechanism, to compensate the energy stored in the compliant parts, resulting in a statically balanced compliant stage (SBCS). Statically balanced compliant stages can be a breakthrough in precision engineering. This paper presents an inventory of platforms suitable for the design of a 6 DoF compliant stage for precision engineering. A literature review on 3-6 DoF compliant stages, static balancing strategies and statically balanced compliant mechanisms (SBCMs) has been performed. A classification from the inventory has been made and followed up by discussion. An obviously superior architecture for a 6 DoF compliant stage was not found. All the 6 DoF stages are either non-statically balanced compliant structures or statically balanced non-compliant structures. The statically balanced non-compliant structures can be transformed into compliant structures using lumped compliance, while all SBCMs had distributed compliance. A 6 DoF SBCS is a great scope for improvements in precision engineering stages.

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“…The two serially-connected prismatic joints in the plane P 1 can be easily designed as a parallel planar mechanism, for instance with the solutions presented in [32][33][34], in order to minimize the compliance of the mechanism that can lower the achievable shaft displacements.…”

Section: The Design Problemmentioning

confidence: 99%

Using Singularities of Parallel Manipulators to Enhance the Rigid-Body Replacement Design Method of Compliant Mechanisms

Rubbert

Caro

Gangloff

et al. 2014

Journal of Mechanical Design

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The rigid-body replacement method is often used when designing a compliant mechanism. The stiffness of the compliant mechanism, one of its main properties, is then highly dependent on the initial choice of a rigid-body architecture. In this paper, we propose to enhance the efficiency of the synthesis method by focusing on the architecture selection. This selection is done by considering the required mobilities and parallel manipulators in singularity to achieve them. Kinematic singularities of parallel structures are indeed advantageously used to propose compliant mechanisms with interesting stiffness properties. The approach is first illustrated by an example, the design of a one degree of freedom compliant architecture. Then the method is used to design a medical device where a compliant mechanism with three degrees of freedom is needed. The interest of the approach is outlined after application of the method. IntroductionCompliant mechanisms are monolithic structures taking advantage of elasticity to produce movements. The absence of backlash and friction allows the production of very accurate movements making them suitable for medical devices [1-3], micropositioning [4,5] and space applications [6]. One challenge is to design compliant mechanisms with multiple degrees of freedom that have adequate stiffness performances, i.e. that demonstrate low stiffnesses along the desired degrees of freedom (DOF), high stiffnesses in the other directions, and that fulfill other design criteria such as compactness. There are different ways to design compliant mechanisms. The most common synthesis approaches, described in [7], are the kinematic-based approaches, the building blocks approaches and the structural optimizationbased approaches. Among the kinematic-based approaches, the FACT method does not require knowledge of existing

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Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage

Cited by 155 publications

References 16 publications

Design and analysis of a high-accuracy flexure hinge

Design and analysis of a high-accuracy flexure hinge

Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

Using Singularities of Parallel Manipulators to Enhance the Rigid-Body Replacement Design Method of Compliant Mechanisms

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