The surface properties of silicone rubber can be modified by irradiation with light from the vacuum ultraviolet (VUV) spectral range of less than 200 nm. After VUV-irradiation at 185 nm with a low-pressure mercury (Hg) lamp, a reduction in residualdust-coverage (PA fibers) of up to 80% was found. At the same time, the long wavelength UV-radiation at 254 nm of the Hg lamp causes a reduction in the optical transmission properties of the silicone bulk. The near-surface and bulk modification of optically highly transparent silicone rubber was analyzed using XPS, ATR, transmission measurements, and investigations into the reduction of the residual-dust-coverage. A comparison was made between a Hg lamp and an excimer lamp at 172 nm. The results provide valuable information for selecting the appropriate irradiation source, depending on the desired spectral range for a given application. The results indicate that excimer lamps should be preferred for optical applications in the UV-spectral range, while Hg lamps are equally suitable for applications in the visible spectral range despite low transmission losses of less than 0.5%. The irradiation dose data were obtained using a ray tracing simulation as part of these investigations to overcome limitations of UV-sensors, such as their accelerated aging and angular dependence.