2022
DOI: 10.1557/s43578-022-00566-6
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Insights into the decomposition of zirconium acetylacetonate using synchrotron radiation: Routes to the formation of volatile Zr-intermediates

Abstract: The thermal decomposition of Zr(acac)4 is studied in a SiC-microreactor on the micro-second time scale. By utilizing synchrotron radiation and photoelectron photoion coincidence spectroscopy, six important zirconium intermediates, as for instance Zr(C5H7O2)2(C5H6O2), and Zr(C5H6O2)2, are identified in the gas phase for the first time. The adiabatic ionization thresholds of intermediately formed zirconium species are estimated and the main products of their thermal decomposition, acetylacetone, acetylallene and… Show more

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Cited by 2 publications
(2 citation statements)
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“…A peak corresponding to acetone ( m / z = 58) was not observed, suggesting that the acac ligand evaporates without fragmentation and deprotonates the residual Zr complex to form the volatile neutral ligand. This proposed decomposition pathway is consistent with previous studies. Heating Zr­(acac) 4 at 120 °C resulted in less than 5% mass loss, indicating that this decomposition pathway requires temperatures of at least 140 °C. Increased mass loss that leveled off at 40% occurred when Zr­(acac) 4 was heated to temperatures between 180 and 220 °C (Figure A).…”
Section: Results and Discussionsupporting
confidence: 91%
“…A peak corresponding to acetone ( m / z = 58) was not observed, suggesting that the acac ligand evaporates without fragmentation and deprotonates the residual Zr complex to form the volatile neutral ligand. This proposed decomposition pathway is consistent with previous studies. Heating Zr­(acac) 4 at 120 °C resulted in less than 5% mass loss, indicating that this decomposition pathway requires temperatures of at least 140 °C. Increased mass loss that leveled off at 40% occurred when Zr­(acac) 4 was heated to temperatures between 180 and 220 °C (Figure A).…”
Section: Results and Discussionsupporting
confidence: 91%
“…Therefore, irrespective of the desired low-temperature processed CTL, the optimized CTL should have good thermal properties, mechanical stability, good scalability, and to withstand the possible harsh processing conditions of semiconductors in multi-layered vertically stacked device structures. Acetylacetonate precursor, a carbon-containing bidentate ligand, is known to be a good precursor for organometallic deposition of a wide range of metals including Zr with notably high stability constant and thermally stable [ 17 , 18 ]. A low-temperature processed zirconium acetylacetonate (ZAA) Zr(C 5 H 7 O 2 ) 4 is promising for high efficient CTMs, which is applicable to a wide variety of substrates and semiconductors owing to its favorable high thermal properties.…”
Section: Introductionmentioning
confidence: 99%