“…The sample were irradiated with 2.0 MeV He 2+ particles. Backscattered particles were detected at an angle of 170 • by using a PIPS (Passivated Implanted Planar Silicon), detector by Canberra, Montigny-Le-Bretonneux, France [67]. Data acquisition was carried out by using the Canberra Genie Software (GENIE™ 2000, Basic Spectroscopy Software by Canberra Industries, Meriden, CT, USA) and experimental data were fitted by the SIMNRA code (version 7.0, Matej Mayer, Max Plank Institute for Plasma Physics, Garching, Germany) [68].…”