CVD of Nonmetals 1996
DOI: 10.1002/9783527614813.ch5
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Cited by 5 publications
(7 citation statements)
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“…Finally, Al−F BDEs are by far the strongest, with values as high as 160 kcal mol -1 . These results are consistent with the fact that lower deposition temperatures are required when, for example, oxides are deposited by CVD from organoaluminum instead of halogenated compounds. , …”
Section: Resultssupporting
confidence: 86%
See 1 more Smart Citation
“…Finally, Al−F BDEs are by far the strongest, with values as high as 160 kcal mol -1 . These results are consistent with the fact that lower deposition temperatures are required when, for example, oxides are deposited by CVD from organoaluminum instead of halogenated compounds. , …”
Section: Resultssupporting
confidence: 86%
“…These results are consistent with the fact that lower deposition temperatures are required when, for example, oxides are deposited by CVD from organoaluminum instead of halogenated compounds. 26,27 These results indicate that bonds to aluminum are generally weaker than those to boron. For example, B-H bonds in trivalent boron compounds are on the order of 105 kcal mol -1 .…”
Section: A Heats Of Formation and Bond Dissociation Energiesmentioning
confidence: 98%
“…These results are consistent with the fact that lower deposition temperatures are required when, for example, oxides are deposited by CVD from organoaluminum instead of halogenated compounds. 36,37 These results indicate that bonds to aluminum are generally weaker than those to boron. For example, B-H bonds in trivalent boron compounds are on the order of 105 kcal mol -1 .…”
Section: Amentioning
confidence: 77%
“…compounds containing both aluminium and silicon, resulted to be more valuable than the employment of mixtures of two compounds, each containing aluminium or silicon, because of the better kinetic control on the growth and the more homogenous composition and structure of the final material(s). 1 On the other hand, recently, novel oxygen-free compounds containing aluminium and silicon have received increasing attention for their potential application in the development of new nitride ceramics. 2 For these reasons and in the framework of our researches on the ligating ability of dimethyldiaminosilane ligands, 3 the study of the interaction of AlX 3 (X = Me, Cl) with SiMe 2 -(NR 2 )(NRЈ 2 ) appeared of interest.…”
Section: Introductionmentioning
confidence: 99%
“…1 H,13 C and29 Si NMR spectra are referred to TMS; 27 Al NMR spectra are referred to [Al(H 2 O) 6 ] ϩ3 in H 2 O. , Fluka) and LiMe (Et 2 O solution, 1.6 M, Aldrich) were used as received. The diaminodimethylsilane compounds were prepared according to the published procedures.3 Only the procedure for AlCl 2 [SiMe 2 (N t Bu)(NC 4 H 8 )] is reported in detail, the others being similar.…”
mentioning
confidence: 99%