Integrated design of piezo-actuated 2-DOF submillimeter-range super-resolution platform with self-sensing unit

Liao, Cheng; Xu, Minglong; Xiao, Ruijiang; Han, Wenwen

doi:10.1016/j.ymssp.2019.106569

Cited by 9 publications

(4 citation statements)

References 22 publications

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“…These piezoelectric motors can produce either linear/rotational motion or both, depending on the design and arrangement of the primary piezoelectric actuation mechanism. Researchers have also developed a series/parallel arrangement of multiple piezoelectric stepping stages to achieve multi-degree freedom linear/rotational motion along different coordinates [50,51]. A detailed review of different configurations of traditional, stepping, and multi-degree freedom piezoelectric actuators are presented in the works of Mohith et al [21], Jianping [52], Liang Wang et al (2019) [53], and Shupeng [54].…”

Section: Overview Of the Piezoelectric Actuation Systemmentioning

confidence: 99%

Application of Modeling and Control Approaches of Piezoelectric Actuators: A Review

Kanchan,

Santhya,

Bhat

et al. 2023

Technologies

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Piezoelectric actuators find extensive application in delivering precision motion in the micrometer to nanometer range. The advantages of a broader range of motion, rapid response, higher stiffness, and large actuation force from piezoelectric actuators make them suitable for precision positioning applications. However, the inherent nonlinearity in the piezoelectric actuators under dynamic working conditions severely affects the accuracy of the generated motion. The nonlinearity in the piezoelectric actuators arises from hysteresis, creep, and vibration, which affect the performance of the piezoelectric actuator. Thus, there is a need for appropriate modeling and control approaches for piezoelectric actuators, which can model the nonlinearity phenomenon and provide adequate compensation to achieve higher motion accuracy. The present review covers different methods adopted for overcoming the nonlinearity issues in piezoelectric actuators. This review highlights the charge-based and voltage-based control methods that drive the piezoelectric actuators. The survey also includes different modeling approaches for the creep and hysteresis phenomenon of the piezoelectric actuators. In addition, the present review also highlights different control strategies and their applications in various types of piezoelectric actuators. An attempt is also made to compare the piezoelectric actuator’s different modeling and control approaches and highlight prospects.

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Section: Overview Of the Piezoelectric Actuation Systemmentioning

confidence: 99%

Application of Modeling and Control Approaches of Piezoelectric Actuators: A Review

Kanchan,

Santhya,

Bhat

et al. 2023

Technologies

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“…The precision motion coupled with good repeatability and better resolution motion increased the scope of piezoelectric actuators in micro optic applications. Micro scanning mirrors, precision positing and focussing of lens and mirrors are some of the functionalities associated with scanning electron microscope, atomic force microscope, while field interferometry, etc [73,268,289]. Piezoelectric tube actuators, multi-DOF piezoelectric stages are commendably employed in such microoptic applications.…”

Section: Applications and Commercial Aspects Of Piezoelectric Actuatorsmentioning

confidence: 99%

Recent trends in piezoelectric actuators for precision motion and their applications: a review

Mohith¹,

Upadhya²,

Navin³

et al. 2020

Smart Mater. Struct.

225

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The need for precision positioning applications has enormously influenced the research and development towards the growth of precision actuators. Over the years, piezoelectric actuators have significantly satisfied the requirement of precision positioning to a greater extent with the capability of broad working stroke, high-accuracy, and resolution (micro/nano range) coupled with the advantage of faster response, higher stiffness, and actuation force. The present review intends to bring out the latest advancement in the field of piezoelectric actuator technology. This review brings out the specifics associated with the development of materials/actuators, the working principles with different actuation modes, and classifications of the piezoelectric actuators and their applications. The present article throws light on the design, geometrical features, and the performance parameters of various piezoelectric actuators right from unimorph, bimorph, and multilayer to the large displacement range actuators such as amplified actuators, stepping actuators with relevant schematic representations and the quantitative data. A comparative study has been presented to evaluate the pros and cons of different piezoelectric actuators along with quantitative graphical comparisons. An attempt is also made to highlight the application domains, commercial and future prospects of technology development towards piezoelectric actuators for precision motion applications. The organization of the paper also assists in understanding the piezoelectric materials applicable to precision actuators. Furthermore, this paper is of great assistance for determining the appropriate design, application domains and future directions of piezoelectric actuator technology.

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“…Liao et al reported a 2-DOF super-resolution stage with a self-sensing unit. In this arrangement, the input unit and the output unit are arranged in the shape of the red part of the Union Flag [40]. Xie et al presented a novel parallel 3-DOF XYZ precision positioning stage with a compact structure.…”

Section: Introductionmentioning

confidence: 99%

Design and Test of a 2-DOF Compliant Positioning Stage with Antagonistic Piezoelectric Actuation

Wu,

Tang,

Qin

2024

Machines

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This paper designs a two-degrees-of-freedom (DOF) compliant positioning stage with antagonistic piezoelectric actuation. Two pairs of PEAs are arranged in an antagonistic configuration to generate reciprocating motions. Flexure mechanisms are intentionally adopted to construct the fixtures for PEAs, whose elastic deformations can help to reduce the stress concentration on the PEA caused by the extension of the PEA in the other direction. Subsequently, the parameter and performance of the 2-DOF compliant positioning stage is optimized and verified by finite element analysis. Finally, a prototype is fabricated and tested. The experimental results show that the developed positioning stage achieves a working stroke of 28.27 μm × 27.62 μm. Motion resolutions of both axes are 8 nm and natural frequencies in the working directions are up to 2018 Hz, which is promising for high-precision positioning control.

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Integrated design of piezo-actuated 2-DOF submillimeter-range super-resolution platform with self-sensing unit

Cited by 9 publications

References 22 publications

Application of Modeling and Control Approaches of Piezoelectric Actuators: A Review

Application of Modeling and Control Approaches of Piezoelectric Actuators: A Review

Recent trends in piezoelectric actuators for precision motion and their applications: a review

Design and Test of a 2-DOF Compliant Positioning Stage with Antagonistic Piezoelectric Actuation

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