Integrated evaluation of diffraction image quality in optical lithography using the rigorous diffraction solution for a slot

Rudnitsky, A. S.

doi:10.1134/s1063784212100180

Cited by 3 publications

(2 citation statements)

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“…2 and 3), which is caused by scattering on the edges [7,10]. Such divergence can be evaluated by a scalar parameter C div [10], which is determined as a ratio of effective width of field energy spatial distribution at a given distance from a screen x = const to the slot width, i.e., as increase of the width of a slot diffraction image at a given distance x with respect to the width of an aperture, creating this image. Fig.…”

Section: Basic Theory and Results Of Computationsmentioning

confidence: 99%

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Spatial Structure of Electromagnetic Field Diffracted by a Sub-Wavelength Slot in a Thick Conducting Screen

Titovitsky¹,

Gratowski²,

Koledov³

2018

PIER M

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Abstract-The eigen-mode technique of rigorous diffraction theory is employed for computation of spatial structure of electromagnetic field, arising under diffraction of a plane wave by a narrow slot of the width of the order of the wavelength or smaller in a perfectly conducting screen of finite thickness. The effects of little step change and of strong enhancement for relative averaged energy density are investigated in dependence of the slot width and depth. It is shown that the field in a space behind the slot represents the sum of a field, slowly and monotonically decreasing in the directions away from a slot, and a harmonic field with sinusoidal spatial inhomogeneities of the order of the wavelength. It is established that the comparative contributions of these two field constituents are unequal for various spatial components of the electric and magnetic fields, and also that the contribution of the first constituent decreases with increase of the slot width.

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Section: Basic Theory and Results Of Computationsmentioning

confidence: 99%

“…Fig. 5 demonstrates the computation results for the parameter of slot image divergence in dependence of its width, which have been obtained according to the method described in [10], for the distance x = 4.0λ. Here, one can see very great value of divergence, which is proper to very narrow slot.…”

Section: Basic Theory and Results Of Computationsmentioning

confidence: 99%