The optimum femtosecond laser direct writing of Bragg gratings on silica optical waveguides has been investigated. The silica waveguide has a 6.5 × 6.5 µm2 cross-sectional profile with a 20-µm-thick silicon dioxide cladding layer. Compared with conventional grating inscribed on fiber platforms, the silica planar waveguide circuit can realize a stable performance as well as a high-efficiency coupling with the fiber. A thin waveguide cladding layer also facilitates laser focusing with an improved spherical aberration. Different from the circular fiber core matching with the Gaussian beam profile, a 1030-nm, 400-fs, and 190-nJ laser is optimized to focus on the top surface of the square silica waveguide, and the 3rd-order Bragg gratings are inscribed successfully. A 1.5-mm long uniform Bragg gratings structure with a reflectivity of 90% at a 1548.36-nm wavelength can be obtained. Cascaded Bragg gratings with different periods are also inscribed in the planar waveguide. Different reflection wavelengths can be realized, which shows great potential for wavelength multiplexing-related applications such as optical communications or sensing.