1998
DOI: 10.1109/3516.662864
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Integrated microendeffector for micromanipulation

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Cited by 97 publications
(40 citation statements)
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“…The development of force sensors for the microscale has been investigated by many researchers [25], [26], [27], [28] especially for micromanipulation and/or microassembly. Their integration in microrobotic systems is a very interesting approach because it provides the information about the contact when it happens and it prevents from breaking components (gripper, microparts, etc).…”
Section: A Integration Of Force Sensors In the Microassembly Stationmentioning
confidence: 99%
“…The development of force sensors for the microscale has been investigated by many researchers [25], [26], [27], [28] especially for micromanipulation and/or microassembly. Their integration in microrobotic systems is a very interesting approach because it provides the information about the contact when it happens and it prevents from breaking components (gripper, microparts, etc).…”
Section: A Integration Of Force Sensors In the Microassembly Stationmentioning
confidence: 99%
“…ARAI ET AL. report that the van der Waals, surface tension, and electrostatic forces depend on "environmental conditions, such as humidify, temperature, surrounding medium, surface condition, material, and relative motion" (Arai et al, 1998 ). Figure 19 shows the adhesive and gravitational forces as functions of the object radius.…”
Section: Sticking Effectsmentioning
confidence: 99%
“…The use of strain gauges for force measurement at the micro-scale has been very common in microrobotics [1, [56][57][58]. The first prototype of a micromanipulation system with an embedded force sensor was developed in Japan in the early 90s [1].…”
Section: From 1992: the Extensive Use Of Strain Gaugesmentioning
confidence: 99%