Integrated microthermoelectric coolers with rapid response time and high device reliability

Li, Guodong; Fernández, Javier García; Ramos, David Alberto Lara; Barati, Vida; Pérez, Nicolás; Soldatov, Ivan; Reith, Heiko; Schierning, Gabi; Nielsch, Kornelius

doi:10.1038/s41928-018-0148-3

Cited by 87 publications

(87 citation statements)

References 38 publications

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“…By combining microscale inorganic TE legs into flexible substrates, microfabrication might be an effective way to overcome the mechanical inflexibility of inorganic TEs . Finally, since most recent studies focus on harvesting thermal energy to generate electricity, devices aiming for FTE cooling effects deserve future investigation …”

Section: Discussionmentioning

confidence: 99%

Flexible Thermoelectric Materials and Generators: Challenges and Innovations

et al. 2019

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The urgent need for ecofriendly, stable, long‐lifetime power sources is driving the booming market for miniaturized and integrated electronics, including wearable and medical implantable devices. Flexible thermoelectric materials and devices are receiving increasing attention, due to their capability to convert heat into electricity directly by conformably attaching them onto heat sources. Polymer‐based flexible thermoelectric materials are particularly fascinating because of their intrinsic flexibility, affordability, and low toxicity. There are other promising alternatives including inorganic‐based flexible thermoelectrics that have high energy‐conversion efficiency, large power output, and stability at relatively high temperature. Herein, the state‐of‐the‐art in the development of flexible thermoelectric materials and devices is summarized, including exploring the fundamentals behind the performance of flexible thermoelectric materials and devices by relating materials chemistry and physics to properties. By taking insights from carrier and phonon transport, the limitations of high‐performance flexible thermoelectric materials and the underlying mechanisms associated with each optimization strategy are highlighted. Finally, the remaining challenges in flexible thermoelectric materials are discussed in conclusion, and suggestions and a framework to guide future development are provided, which may pave the way for a bright future for flexible thermoelectric devices in the energy market.

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Section: Discussionmentioning

confidence: 99%

Flexible Thermoelectric Materials and Generators: Challenges and Innovations

et al. 2019

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“…That is, they must carry with them a small, renewable energy source, preferably integrated on the same chip or in the same package. Consequently, significant interest has developed in small microelectronic thermoelectric generators (µTEGs) as one method to power energy autonomous IoT devices wherever a reliable thermal gradient exists 1,[4][5][6][7][8][9] .…”

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confidence: 99%

Si0.97Ge0.03 microelectronic thermoelectric generators with high power and voltage densities

Dhawan

Madusanka

et al. 2020

Nat Commun

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Microelectronic thermoelectric generators are one potential solution to energizing energy autonomous electronics, such as internet-of-things sensors, that must carry their own power source. However, thermoelectric generators with the mm 2 footprint area necessary for onchip integration made from high thermoelectric figure-of-merit materials have been unable to produce the voltage and power levels required to run Si electronics using common temperature differences. We present microelectronic thermoelectric generators using Si 0.97 Ge 0.03 , made by standard Si processing, with high voltage and power generation densities that are comparable to or better than generators using high figure-of-merit materials. These Si-based thermoelectric generators have <1 mm 2 areas and can energize off-the-shelf sensor integrated circuits using temperature differences ≤25 K near room temperature. These generators can be directly integrated with Si circuits and scaled up in area to generate voltages and powers competitive with existing thermoelectric technologies, but in what should be a far more cost-effective manner.

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“…In contrast to macroscopic devices, the thickness of the optimized metallic contacts may be comparable to the thickness of the active thermoelectric elements. Following these design guidelines µTECs were recently experimentally realized with significantly improved device reliability, clearly showing that the hereby proposed improvement method for the electrical contacts has a significant impact in the performance of integrated µTECs …”

Section: Resultsmentioning

confidence: 88%

Design Guidelines for Micro‐Thermoelectric Devices by Finite Element Analysis

Ramos

Barati

Garcı́a

et al. 2019

Advanced Sustainable Systems

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Energy harvesting and thermal management are required for applications in the internet‐of‐things, autarkic sensors, or highly integrated electronic devices. Thermoelectric devices, both generators and coolers, are promising specialized technologies for localized energy harvesting and thermal management. These devices are well optimized for near‐room temperature operation at the macroscopic scale. However, the high integration density of today's most significant applications requires an increasing degree of miniaturization. Understanding the design guidelines for micro‐thermoelectric devices with realistic materials properties, and with concurring size and geometry constraints, is a challenge that has not been fully addressed up to now. Here, finite element analysis is used to understand the interplay between thermal and electrical heat fluxes in micro‐thermoelectric devices. The relevant design guidelines for metallic top and bottom contacts and thermoelectric elements, as well as an optimal packing density of the thermoelectric elements are identified. The results demonstrate that on the micrometer scale, the effects of net electrical and thermal resistances of the individual components of the devices (i.e., thermoelectric leg, top, and bottom contacts) are of comparable magnitude. This makes it necessary to apply design strategies specific to the micrometer scale, in order to geometrically optimize the device.

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Integrated microthermoelectric coolers with rapid response time and high device reliability

Cited by 87 publications

References 38 publications

Flexible Thermoelectric Materials and Generators: Challenges and Innovations

Flexible Thermoelectric Materials and Generators: Challenges and Innovations

Si0.97Ge0.03 microelectronic thermoelectric generators with high power and voltage densities

Design Guidelines for Micro‐Thermoelectric Devices by Finite Element Analysis

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