Integrated on-line multisensing of fluid flow using a mechanical resonator

Dring, Alan L; Jones, Barry E.

doi:10.1016/s0924-4247(00)00429-5

Cited by 2 publications

(1 citation statement)

References 3 publications

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“…Microbridge resonators can be used as a sensing element to measure various parameters such as pressure [1][2][3], acceleration [4], biochemical adsorption/ reactions [5], mass-flow [6][7], infrared ray [8][9] et al Typically, pressure, acceleration or surface stress induced by biochemical molecular reactions are first converted into a longitudinal strain of microbridge, which is subsequently converted into the resonance frequency shift. The gauge factor and quality factor of these mechanical sensors have been given by Harrie A C [10].…”

Section: Introductionmentioning

confidence: 99%

Dependence of the Resonance Frequency of Mircobridge Resonators on the Thermal Power and Vacuum

Han

Wang

Feng

2012

AMR

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Microbridge resonators have been widely used as sensing elements to measure various parameters, such as pressure, acceleration, biochemical adsorption and reactions, mass-flow, infrared ray et al. But no model has been built to calculate quantitatively the shift of resonance frequency due to heat convection, incident infrared ray, excited thermal power drift and ambient air pressure. In this paper, a theoretical analysis is given to calculate the resonance frequency shift due to the thermal power (static heating power and dynamic heating power) fluctuation and the added mass of the ambient air. The model can be used to design resonant sensors based on microbridge resonator, such as resonant mass-flow sensors, resonant IR detectors, resonant biochemical sensors and resonant vacuum gauge, et al.

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Section: Introductionmentioning

confidence: 99%

Dependence of the Resonance Frequency of Mircobridge Resonators on the Thermal Power and Vacuum

Han

Wang

Feng

2012

AMR

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Monolithically fabricated double-ended tuning-fork-based force sensor

Fukuzawa

Ando

Shibamoto

et al. 2006

Journal of Applied Physics

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A highly sensitive force sensor that is suitable for precise gap control is presented. It combines a double-ended tuning fork (DETF) resonator with a cantilever beam. When the force to be measured is applied to the cantilever beam, the resonant frequency of the DETF beam changes due to the change in axial force. The DETF-based sensor can detect the force as an amplitude change due to the resonant frequency change. The performance of the sensor was theoretically and experimentally investigated. The sensor is rigid and can measure the force with a change in the sample or probe height of less than about 1nm. The experimentally attained minimum detection limit of the force was 19μN and this can be improved by more than one order of magnitude according to theoretical estimation. The combination of the DETF-based sensor and the fixed probe or sample is expected to provide the measurement of the surface force with precise gap control. It can be useful for various fields such as interface science, probe microscopy, and microtribology.

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Integrated on-line multisensing of fluid flow using a mechanical resonator

Cited by 2 publications

References 3 publications

Dependence of the Resonance Frequency of Mircobridge Resonators on the Thermal Power and Vacuum

Dependence of the Resonance Frequency of Mircobridge Resonators on the Thermal Power and Vacuum

Monolithically fabricated double-ended tuning-fork-based force sensor

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