Integrated-optic ring resonators with two stacked layers of silica waveguide on Si

Suzuki, S.; Shuto, K.; Hibino, Y.

doi:10.1109/68.166960

Cited by 63 publications

(34 citation statements)

References 4 publications

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“…The structure in Fig. 1 takes advantage of vertical coupling between the bus and outer rings for precise control of the coupling strength [4]- [8]. The rings are all mutually coupled laterally.…”

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confidence: 99%

Very High-Order Microring Resonator Filters for WDM Applications

Little¹,

Chu²,

Absil³

et al. 2004

IEEE Photon. Technol. Lett.

475

225

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High-order microring resonators having from 1 to 11 coupled cavities are demonstrated. These filters exhibit low loss, flat tops, and out-of-band rejection ratios that can exceed 80 dB. They achieve performance that is suitable for commercial applications.Index Terms-Cavity resonators, filters, integrated optics, resonator filters, resonators, wavelength-division multiplexing (WDM).T IGHT CHANNEL spacing in wavelength-division-multiplexed (WDM) systems calls for filters that exhibit boxlike response. As channels are packed more closely together, filter specs become more demanding and tax available technologies to produce the required spectral performance. Thin-film filters (TFFs) have played a critical role in WDM systems due in part to the fidelity of their response which is achieved by the use higher order or coupled cavities. The ability to go to higher and higher orders has made resonators invaluable not only at optical frequencies but at all frequencies from kilohertz to microwaves. Significant fabrication challenges remain in TFFs as either the channel spacing decreases or the number of cavities increases. For instance, a four-cavity TFF for 25-GHz channel spacing applications requires from 200 to 400 sequentially deposited layers. In addition, as channel count increases, stack up losses in discrete TFFs mount.Microring resonators fabricated in planar technology offer significant advantages over discrete TFFs. In terms of fabrication, almost arbitrarily high orders can be produced with microring resonators, as all cavities reside in a single dielectric layer, as opposed to requiring hundreds of layers. Rings support traveling wave modes. This allows them to have four spatially separated ports which gives them unique advantages in optical circuit architectures. In this letter, we demonstrate very high-order microring cavities having commercial grade performance for 50-and 25-GHz applications.Coupled microrings have been suggested for add-drop filter applications [1]. Fig. 1 shows the schematic of such a filter having three cavities. Multiring cavities have been analyzed by matrix methods [2] as well as in the time domain [3]. The timedomain formulation yields a simple continued fraction representation of the filter response which may be written down by inspection for any th-order filter as (1a) Manuscript Fig. 1. Third-order microring resonator filter comprised of three coupled rings. The input and output bus waveguides are vertically coupled to the rings while the rings are laterally coupled to their neighbors. (1b)where all rings are identical and lossless. The frequency offset is denoted by , where is the resonant frequency. The term is related to the bus-to-ring coupling, while the terms are related to the coupling between adjacent rings [3]. The structure in Fig. 1 takes advantage of vertical coupling between the bus and outer rings for precise control of the coupling strength [4]- [8]. The rings are all mutually coupled laterally. During fabrication, all cavities are printed in the same step, unlike TF...

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mentioning

confidence: 99%

Very High-Order Microring Resonator Filters for WDM Applications

Little¹,

Chu²,

Absil³

et al. 2004

IEEE Photon. Technol. Lett.

475

225

View full text Add to dashboard Cite

show abstract

“…The router as well as the rOADMs have been implemented using vertically coupled Microring Resonators (MRs) [6,7] fabricated in the Si 3 N 4 /SiO 2 materials system [8]. The application of a high contrast materials system (Δn≈0.55) for the highly selective MR-based filters allows for the creation of complex devices on a small footprint [9][10][11][12][13].…”

Section: Design and Fabricationmentioning

confidence: 99%

“…A major concern when fabricating vertically coupled MRs [6,7,13] is the correct alignment of the resonator to the port waveguides. An advanced waferstepper tool, in our case an ASML PAS-5500 TM /275, was therefore used for the exposure of the critical resonator and port waveguide layers.…”

Section: Design and Fabricationmentioning

confidence: 99%

Densely integrated microring resonator based photonic devices for use in access networks

Klein¹,

Urban²,

Sengo³

et al. 2007

Opt. Express

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“…This is a prerequisite for complex structures, since multi MR devices with large FSR can only meet the specifications when they are small in size and have low losses. It is therefore not surprising that quite some interest has been shown for MRs in the SiON technology, see for example [20,62,69,72]. Some of the previous figures in this chapter ( Fig.…”

Section: Reconfigurable Optical Add/drop Multiplexermentioning

confidence: 74%

“…MRs evolved from the fields of fibre optic ring resonators and micron scale droplets [1][2][3][4]. Their inherently small size (with typical diameters in the range between several to tens of micrometres), their filter characteristics and their potential for being used in complex and flexible configurations make these devices particularly attractive for integrated optics or VLSI photonics applications [5][6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Ring-Resonator-Based Wavelength Filters

Geuzebroek

Driessen

Springer Series in Optical Sciences

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Integrated-optic ring resonators with two stacked layers of silica waveguide on Si

Cited by 63 publications

References 4 publications

Very High-Order Microring Resonator Filters for WDM Applications

Very High-Order Microring Resonator Filters for WDM Applications

Densely integrated microring resonator based photonic devices for use in access networks

Ring-Resonator-Based Wavelength Filters

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