2020 IEEE 70th Electronic Components and Technology Conference (ECTC) 2020
DOI: 10.1109/ectc32862.2020.00036
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Integrated optical single-mode waveguide structures in thin glass for flip-chip PIC assembly and fiber coupling

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Cited by 10 publications
(4 citation statements)
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“…We recently found a way to reduce these losses in curved sections through a simple adjustment of the layout of the diffusion mask. This idea traces itself to a work published by Fraunhofer IZM [3] employing S-bends. To avoid influencing factors such as changes of curve direction in the S-bend, in the present study for the first time, 90° curved waveguides are exhibited having zones of higher refractive index due to wider diffusion mask openings reducing the propagation loss.…”
Section: Optical Waveguide Integrationmentioning
confidence: 92%
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“…We recently found a way to reduce these losses in curved sections through a simple adjustment of the layout of the diffusion mask. This idea traces itself to a work published by Fraunhofer IZM [3] employing S-bends. To avoid influencing factors such as changes of curve direction in the S-bend, in the present study for the first time, 90° curved waveguides are exhibited having zones of higher refractive index due to wider diffusion mask openings reducing the propagation loss.…”
Section: Optical Waveguide Integrationmentioning
confidence: 92%
“…In this work, we explain our "photonic System-in-Package (pSiP)"-concept and demonstrate hybrid integrated photonic systems in the millimeter size based on previous work [1,2]. Thin glass has been used for many years for new approaches for electrical-optical circuit boards and optical backplanes by embedding it in a PCB and integrating the optical waveguides into the glass [3,4,5,6]. Such glass boards host optical and electrical signal distribution, supplemented by optical free-space elements and transparent windows with or without additional beam shaping optics, hermetically sealed capping and interfaces to optical fiber links.…”
Section: Introductionmentioning
confidence: 99%
“…On straight sections, this process is characterized by its low level of optical attenuation. However, masked production can only be adjusted with higher effort and costs [14].…”
Section: Fabrication Of Integrated Waveguides In Glassmentioning
confidence: 99%
“…Based on this procedure, we developed a process running on commercial equipment, consisting of a CO 2 -laser cutting system, a sputtering system, a dip-coating system using a positive resist, and a laser direct imaging system. After starting the development on wafer level 19 using wafer sized glasses and a mask exposure for lithography, the process was first scaled up to 297 mm × 210 mm rectangular sized glass-panel with a flexible layout of the waveguides using laser direct imaging for lithography. 20 Based on this, the size of the processable panel was increased to 457 mm × 305 mm.…”
Section: Glass Integrated Waveguidesmentioning
confidence: 99%