Integrated Pyroelectric Infrared Sensor Using PbTiO3 Thin Film

Okuyama, Masanori; Seto, Hiroki; Kojima, Masashi; Matsui, Y.; Hamakawa, Y.

doi:10.7567/ssdm.1982.c-3-4

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2008

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“…1) They have been studied from basic solid-state properties to device application such as infrared sensors, nonvolatile memory, and piezoelectric devices. [2][3][4][5] During actual device processes, they are heat-treated under low-oxygen partial pressure or deoxidized conditions. It is known that the electric properties of PbTiO 3 are degraded by these conditions.…”

Section: Introductionmentioning

confidence: 99%

Raman Spectroscopy Study of Oxygen Vacancies in PbTiO₃ Thin Films Generated Heat-Treated in Hydrogen Atmosphere

Nishida

Osada

Takeuchi

et al. 2008

jjap

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Raman spectroscopy is utilized to study the evaluation of vacancies in PbTiO 3 thin films subjected to hydrogen atmosphere heat treatment. The B 1 mode consisted of only oxygen ion vibration was shifted to lower frequency with increasing heat treatment temperature. It was considered that the oxygen ions were lacking from PbTiO 3 , and that oxygen vacancies were generated. It was found that the frequency of the B 1 mode is proportional to oxygen ion content. Pb ions were also lacking in the PbTiO 3 thin films with oxygen ions and the number of oxygen vacancies was larger than that of Pb ions. We suggest that the Raman spectroscopy is a suitable tool for the evaluation of oxygen vacancies in PbTiO 3 thin films.

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Section: Introductionmentioning

confidence: 99%

Raman Spectroscopy Study of Oxygen Vacancies in PbTiO₃ Thin Films Generated Heat-Treated in Hydrogen Atmosphere

Nishida

Osada

Takeuchi

et al. 2008

jjap

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Integrated Pyroelectric Infrared Sensor Using PbTiO3 Thin Film

Cited by 1 publication

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Raman Spectroscopy Study of Oxygen Vacancies in PbTiO₃ Thin Films Generated Heat-Treated in Hydrogen Atmosphere

Raman Spectroscopy Study of Oxygen Vacancies in PbTiO₃ Thin Films Generated Heat-Treated in Hydrogen Atmosphere

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Integrated Pyroelectric Infrared Sensor Using PbTiO3 Thin Film

Cited by 1 publication

References 0 publications

Raman Spectroscopy Study of Oxygen Vacancies in PbTiO3 Thin Films Generated Heat-Treated in Hydrogen Atmosphere

Raman Spectroscopy Study of Oxygen Vacancies in PbTiO3 Thin Films Generated Heat-Treated in Hydrogen Atmosphere

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Raman Spectroscopy Study of Oxygen Vacancies in PbTiO₃ Thin Films Generated Heat-Treated in Hydrogen Atmosphere

Raman Spectroscopy Study of Oxygen Vacancies in PbTiO₃ Thin Films Generated Heat-Treated in Hydrogen Atmosphere