2022
DOI: 10.1002/lpor.202200130
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Integrated Subwavelength Gratings on a Lithium Niobate on Insulator Platform for Mode and Polarization Manipulation

Abstract: Lithium niobate on insulator (LNOI) has emerged as a promising platform for photonic integrated circuits, with a fast‐growing toolbox of components. This paper proposes, designs, and experimentally demonstrates compact subwavelength grating (SWG) waveguides on an LNOI platform for on‐chip mode and polarization manipulation. To overcome the limitation of waveguide fabrication, the SWGs are designed and formed on a silicon nitride thin film deposited onto the surface of LNOI chip. As proof‐of‐concept devices, th… Show more

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Cited by 28 publications
(19 citation statements)
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“…[10] As a common optical loading material on the LNOI platform, Si 3 N 4 has a similar but slightly lower refractive index and similar transparency window to LN, and more importantly, it can be deposited and pat-terned by the mature fabrication processes that have been developed in CMOS foundries. This platform uses the mature Si 3 N 4 fabrication process while the waveguide design results in most of the optical field being confined in the LN layer, [10,[27][28][29] taking full advantage of LN's attractive properties. Figure 1a shows a schematic diagram of the 90°multimode waveguide bend formed by a circular curved waveguide with two similar curved air grooves.…”
Section: Design and Working Principlementioning
confidence: 99%
“…[10] As a common optical loading material on the LNOI platform, Si 3 N 4 has a similar but slightly lower refractive index and similar transparency window to LN, and more importantly, it can be deposited and pat-terned by the mature fabrication processes that have been developed in CMOS foundries. This platform uses the mature Si 3 N 4 fabrication process while the waveguide design results in most of the optical field being confined in the LN layer, [10,[27][28][29] taking full advantage of LN's attractive properties. Figure 1a shows a schematic diagram of the 90°multimode waveguide bend formed by a circular curved waveguide with two similar curved air grooves.…”
Section: Design and Working Principlementioning
confidence: 99%
“…Thus, such Si 3 N 4 -loaded LNOI waveguides can retain the excellent material characteristics of LN, while avoiding the direct etching of LN and simplifying the fabrication processes. [19,29,46] Here, our proposed 3 dB power splitter based on the tapered SWG-assisted Y-branch can effectively split power with lower loss and less imbalance in an ultra-wide bandwidth, in which the tapered SWG plays both functions of adiabatic taper and SWG simultaneously. Thus, it can effectively increase the evanescent coupling and reduce radiation loss at the Y-junction to improve the performance of the proposed device.…”
Section: Introductionmentioning
confidence: 99%
“…In this contribution, we design, fabricate, and experimentally demonstrate an optical mode switch that uses a three-waveguide-coupling structure based on a silicon nitride-loaded lithium niobate on insulator (Si 3 N 4 -LNOI) waveguide platform. , To achieve high-speed operation, we adopt traveling wave electrodes for the RF signal, which is phase-matched to the group index of the optical wave in the waveguides. This enabled us to demonstrate an ultrafast switching time of below 28 ps, for an optical mode switch that exhibited an insertion loss of 4.3 dB and an extinction ratio (ER) of 17.1 dB, at a wavelength of 1550 nm.…”
Section: Introductionmentioning
confidence: 99%