Integrating electro-discharge machining and photolithography: work in progress

Reynaerts, Dominiek; Meeusen, Wim; Song, Xiaozhong; Brussel, Hendrik Van; Reyntjens, Steve; Bruyker, Dirk De; Puers, Robert

doi:10.1088/0960-1317/10/2/315

Cited by 12 publications

(6 citation statements)

References 9 publications

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“…M ICRO-ELECTRO-DISCHARGE machining (micro-EDM) is an attractive microfabrication technique that can be used to cut any electrically conductive material, including steel, graphite, silicon [1], and magnetic materials [2], [3], including permanent magnets [4]. It involves the sequential discharge of electrical pulses between a microscopic electrode and the workpiece while both are immersed in a dielectric oil [5].…”

Section: Introductionmentioning

confidence: 99%

“…This paper presents new electrode and circuit configuration that improve the throughput by . 1 Section II describes the fabrication and wear of the electrode arrays; Section III presents an advanced approach to accelerate machining rate by using electrically partitioned electrode arrays that intend to achieve independent discharge pulses timing; whereas Section IV presents the impact of parasitic capacitance upon surface roughness. A thyristor based model for the electro-discharge is used to predict scaling trends.…”

Section: Introductionmentioning

confidence: 99%

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Batch mode micro-electro-discharge machining

Takahata

Gianchandani

2002

J. Microelectromech. Syst.

181

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This paper describes a micro-electro-discharge machining (micro-EDM) technique that uses electrode arrays to achieve high parallelism and throughput in the machining. It explores constraints in the fabrication and usage of high aspect ratio LIGA-fabricated electrode arrays, as well as the limits imposed by the pulse discharge circuits on machining rates. An array of 400 Cu electrodes with 20 m diameter was used to machine perforations in 50-m-thick stainless steel. To increase the spatial and temporal multiplicity of discharge pulses, arrays of electrodes with lithographically fabricated interconnect and block-wise independent pulse control resistance-capacitance (RC) circuits are used, resulting in 100 improvement in throughput compared to single electrodes. However, it was found to compromise surface smoothness. A modified pulse generation scheme that exploits the parasitic capacitance of the interconnect offers similarly high machining rates and is more amenable to integration. Stainless steel workpieces of 100 m thickness were machined by 100 m 100 m square cross-section electrodes using in 85 s using an 80-V power supply. Surface smoothness was unaffected by electrode multiplicity. Using electrode arrays with four circuits, batch production of 36 WC-Co gears with 300 m outside diameter and 70 m thickness in 15 min is demonstrated. [692] Index Terms-Electro-discharge machining (EDM), high aspect ratio, LIGA, metal microstructures.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Batch mode micro-electro-discharge machining

Takahata

Gianchandani

2002

J. Microelectromech. Syst.

181

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“…An implantable device called a stent is presented in Subsection 4.2 as another example of mechanical devices fabricated by µEDM. The technique has been used for bulk micromachining of heavily doped single crystal silicon Heeren et al, 1997), and it has been integrated with lithography processes to construct an inertial sensor (Reynaerts et al, 2000). Needle-shaped HARMST neural electrode arrays have been fabricated from highly doped silicon using a combination of wire µEDM and isotropic wet etching (Tathireddy et al, 2009).…”

Section: Applicationmentioning

confidence: 99%

Micro-Electro-Discharge Machining Technologies for MEMS

Takahata¹

2009

Micro Electronic and Mechanical Systems

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“…To illustrate the compatibility of the micro-EDM technology with photolithography, a silicon uni-axial inclination sensor is designed and fabricated using the hybrid technology [7], [8]. The aim of this work is to set up a hybrid technology that inherits the particular benefits of both micro-EDM and photolithography.…”

Section: Uni-axial Inclination Sensormentioning

confidence: 99%

Micro-electro-discharge machining as microsensor fabrication technology

et al. 2003

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This paper presents the design and fabrication of three miniaturized mechanical sensors to demonstrate the three-dimensional machining capabilities of micro-electro-discharge machining (EDM). The first sensor is an inertial bi-axial inclination sensor. The displacement of an inertial mass is measured optically by means of a two-dimensional position sensitive device (PSD). The machining freedom of micro-EDM makes it possible to produce both sensor and housing in one monolithic structure. The second sensor is an inertial uni-axial inclination sensor, which demonstrates the compatibility of the micro-EDM technology with the conventional photolithographic micromachining technologies. The mechanical structure of the sensor is machined by micro-EDM and the capacitive sensing part is produced by lithography. The aim of the integration is to set up a hybrid technology, which inherits the benefits of both micro-EDM and photolithography. The third miniaturized sensor is a three-component force sensor. The mechanical structure of the force sensor converts forces into displacements, which are measured optically. The mechanical structure of the force sensor is produced by wire-EDM and micro-EDM.Index Terms-Force sensor, inclination sensor, micro-electrodischarge machining (EDM).

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Integrating electro-discharge machining and photolithography: work in progress

Cited by 12 publications

References 9 publications

Batch mode micro-electro-discharge machining

Batch mode micro-electro-discharge machining

Micro-Electro-Discharge Machining Technologies for MEMS

Micro-electro-discharge machining as microsensor fabrication technology

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