Integrating ZnO Microwires with Nanoscale Electrodes Using a Suspended PMMA Ribbon for Studying Reliable Electrical and Electromechanical Properties

Abstract

A simple method for making electrical connections to ZnO microwires is reported. By using a suspended poly(methyl methacrylate) (PMMA) ribbon, it is shown that it is possible to electrically contact 1-2 µm diameter ZnO microwires with metal electrodes that are only 90 nm thick. The contact resistances of ZnO microwire-based electronic devices fabricated by this method are lower than those of devices fabricated by standard electronbeam lithography and evaporation processes. As one of the possible device applications from this fabrication method, suspended ZnO microwire-based electromechanical devices are produced and their piezoelectric properties are investigated. Piezoelectric-induced current is detected when the suspended microwires are induced to vibrate at their resonant frequency. This fabrication method can be readily and generally applied to prepare nanoscale electrodes on micrometer-sized materials and provides a convenient means for studying their electrical and electromechanical phenomena in a reliable manner.as well as electromechanical properties of microstructures in a reliable and a controllable manner.

Engineering Optical and Electronic Properties of WS2 by Varying the Number of Layers

“…Then, the flakes were transferred to other substrates with different thicknesses of SiO 2 (2.9À302 nm) by the following steps. 41 Optical images were obtained using a Nikon eclipse LV150 with an optional optical filter. The intensity of the image was obtained using ImageJ software.…”

Accurate and Precise Determination of Mechanical Properties of Silicon Nitride Beam Nanoelectromechanical Devices

“…The dynamic flexural measurements were carried out at room temperature and in a low vacuum condition of around 3 × 10 –3 Torr. The SiN beams were actuated by mechanical stimuli induced from the vibration of a piezo-ceramic located underneath the substrate . When the AC frequency applied to the piezo-ceramic matches the mechanical resonance frequency of the SiN beam, the beam exhibits resonance behavior.…”

“…The SiN beams were actuated by mechanical stimuli induced from the vibration of a piezo-ceramic located underneath the substrate. 13 When the AC frequency applied to the piezo-ceramic matches the mechanical resonance frequency of the SiN beam, the beam exhibits resonance behavior. An optical interferometry technique, suitable for detecting resonance behavior of insulating devices, was employed to detect the vibrational motion.…”

“…In recent years, nanoelectromechanical resonators have been the focus of numerous studies because of their desirable properties, such as low energy consumption, , rapid response time, high sensitivities, and ease of integration . As a result of the interest shown by both experimental and theoretical researchers, − advances in both fundamental and applied science have been achieved through realization of nanoelectromechanical systems (NEMS), such as nonvolatile memory devices with high speed operation, frequency tunable RF receivers, − power generators for energy harvesting, and ultrasensitive mass detectors. − …”

One-Dimensional ZnO/Gold Junction for Simultaneous and Versatile Multisensing Measurements

“…Recent studies have reported on the integration of various micro- and nanostructures on micropatterned electrodes. Relevant examples are p-type field effect transistors using CuO nanowires (NWs) 2 , photoconductive-terahertz detectors with single GaAs NWs 3 , electromechanical devices with ZnO microwires (μ-wires) 9 , photodetectors based on SiC and ZnO NWs 10 11 .…”