Integration of a fiber interferometer with a MEMS probe station

Abstract

We present the integration of an optical fiber interferometer with a MEMS probe station for measuring the out-of-plane displacement of MEMS structures. The interferometric system presented uses a phase generated carrier demodulation scheme. Digital signal processing techniques provide a theoretical measurement dynamic range greater than 10 . Experimental results characterizing a novel vertical-lift electro-thermal actuator are presented. These results are in good agreement with modeling data based on finite element analysis.