Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors

Chen, Wei; Beidaghi, Majid; Penmatsa, Varun; Bechtold, Kevin; Kumari, Latha; Li, W Z; Wang, Chunlei

doi:10.1109/tnano.2010.2049500

Cited by 73 publications

(17 citation statements)

References 16 publications

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“…Since lithography techniques are used for the patterning purpose, the electrodes obtained by this manner have better resolution and reproducibility when compared to the traditional casted carbon ink electrodes [9]. Such carbon structures have been used in applications such as on-chip supercapacitors [10], microbatteries [11], DNA detection [12], glucose sensors [13] and dielectrophoretic electrode arrays for the micromanipulation of micro-and nanoparticles [14]. In addition, different research groups have adapted this method to produce carbon architectures such as suspended nanowires, nanobridges and three-dimensional (3D) carbon micropillars [15].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis

Penmatsa¹,

Kawarada²,

Wang³

2012

J. Micromech. Microeng.

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High-throughput synthesis of carbon nanostructures with reproducible shape and dimensions, at desired locations, has been a key challenge for further exploring carbon nanostructures as functional units in various nanodevices. In this work, carbon structures with dimensions from the 50 nano-to micrometer level have been fabricated by carbonizing a photo-nanoimprint lithography patterned resist polymer (AR-UL-01) at high temperature under inert atmosphere. The resulting carbon nanostructures showed significant vertical shrinkage but minimal loss in the lateral direction. Thermal behavior studies of the resist polymer in the pyrolysis cycle indicated gaseous evolution of various byproducts before the formation of solid carbon. Microstructure, elemental composition and resistivity characterization of the nanostructures produced by this process has shown that the carbon derived from a pyrolyzed nanoimprint resist is very similar to the pyrolyzed photoresist carbon from an SU-8 negative-tone photoresist. This simple approach is valuable as a wafer-level carbon nano-patterning technique.

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Section: Introductionmentioning

confidence: 99%

Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis

Penmatsa¹,

Kawarada²,

Wang³

2012

J. Micromech. Microeng.

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“…Micro-supercapacitors offer high power densities, which are several times higher than those of conventional batteries and supercapacitors due to their short ion diffusion length. In this regard, different nanostructured carbon materials, including ac [133], onion-like carbon [134], carbide derived carbon [135], CNTs [136] and graphene dots [137], have been directly exploited as the electrodes for micro-supercapacitors. In addition, other inorganic materials such as RuO 2 [138] and MnO 2 [139] and conducting polymers such as PANI [140] and PPY [141] have also been investigated as electrodes for micro-supercapacitors.…”

Section: Graphene For Micro-supercapacitorsmentioning

confidence: 99%

Graphene based 2D-materials for supercapacitors

Palaniselvam

Baek

2015

2D Mater.

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Ever-increasing energy demands and the depletion of fossil fuels are compelling humanity toward the development of suitable electrochemical energy conversion and storage devices to attain a more sustainable society with adequate renewable energy and zero environmental pollution. In this regard, supercapacitors are being contemplated as potential energy storage devices to afford cleaner, environmentally friendly energy. Recently, a great deal of attention has been paid to two-dimensional (2D) nanomaterials, including 2D graphene and its inorganic analogues (transition metal double layer hydroxides, chalcogenides, etc), as potential electrodes for the development of supercapacitors with high electrochemical performance. This review provides an overview of the recent progress in using these graphene-based 2D materials as potential electrodes for supercapacitors. In addition, future research trends including notable challenges and opportunities are also discussed. RECEIVED

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“…CNTs have been studied widely for their high accessible surface area, good conductivity and high structural stability [51][52][53]. CNTs were integrated onto carbon microstructure arrays by the catalytic chemical vapor deposition (CVD) method to increase the conductivity and surface area [54]. Firstly, a 3D carbon microstructure array was fabricated by the normal carbon-based MEMS technique.…”

Section: Integration Of Nanostructures On Carbon-based Mems/nemsmentioning

confidence: 99%

Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

Jiang

Shi

Zhan

et al. 2015

J. Micromech. Microeng.

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The carbon-based micro/nano electromechanical system (MEMS/NEMS) technique provides a powerful approach to large-scale manufacture of high-aspect-ratio carbon structures for wafer-level processing. The fabricated three-dimensional (3D) carbon structures have the advantages of excellent electrical and electrochemical properties, and superior biocompatibility. In order to improve their performance for applications in micro energy storage devices and microsensors, an increase in the footprint surface area is of great importance. Various approaches have been proposed for fabricating large surface area carbon-based structures, including the integration of nanostructures such as carbon nanotubes (CNTs), graphene, nanowires, nanofilms and nanowrinkles onto 3D structures, which has been proved to be effective and productive. Moreover, by etching the 3D photoresist microstructures through oxygen plasma or modifying the photoresist with specific materials which can be etched in the following pyrolysis process, micro/nano hierarchical carbon structures have been fabricated. These improved structures show excellent performance in various applications, especially in the fields of biological sensors, surface-enhanced Raman scattering, and energy storage devices such as micro-supercapacitors and fuel cells. With the rapid development of microelectronic devices, the carbon-based MEMS/NEMS technique could make more aggressive moves into microelectronics, sensors, miniaturized power systems, etc. In this review, the recent advances in the fabrication of micro/nano hierarchical carbon-based structures are introduced and the technical challenges and future outlook of the carbon-based MEMS/NEMS techniques are also analyzed.

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Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors

Cited by 73 publications

References 16 publications

Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis

Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis

Graphene based 2D-materials for supercapacitors

Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

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