2005
DOI: 10.1016/j.mee.2005.07.074
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Integration of metal insulator metal capacitors (MIM-Caps) with low defectivity into a copper metallization

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Cited by 8 publications
(5 citation statements)
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“…As can be seen, the number of vias does not significantly affect the quality factor, which decreases slightly with decreasing number of vias. Parasitic resistance was calculated from the differential impedance used in (1) and (2). According to the measurements, the difference in the values of the parasitic resistances and the capacitances at the frequency of 1GHz was 0.2 Q and 20 fF, respectively.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…As can be seen, the number of vias does not significantly affect the quality factor, which decreases slightly with decreasing number of vias. Parasitic resistance was calculated from the differential impedance used in (1) and (2). According to the measurements, the difference in the values of the parasitic resistances and the capacitances at the frequency of 1GHz was 0.2 Q and 20 fF, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…High conductivity materials in interconnections, low substrate coupling, and high permittivity (high-K) materials for reducing leakage currents can be used. [2] The leakage current increases when the gate oxide thickness is scaled to nanometer region. It can be reduced by using high-K materials in transistor gate insulator.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, it is not the W/L ratio, but the W×L product that is important [132]- [139]. The coarse tuning band has a tuning range of 300MHz and a frequency resolution of 1.7MHz.…”
Section: Rtwo Frequency Tuningmentioning
confidence: 99%
“…However, now instead of using an analog control signal, the DCO capacitors will be controlled by digital bits (either "high" or "low") as shown in Figure 3 As the gate to source/drain voltage decreases, the depletion layer thickness changes which results in a change in effective capacitance. Therefore, the capacitance is dependent on the gate voltage as shown in Figure 3 Single Nitride MIM capacitors [61] can be connected into an oscillator by using NMOS transistors as switches. The output frequency is controlled by switching the MIM-caps in and out of the circuit.…”
Section: Digitally Controlled Oscillator (Dco) Fundamentalsmentioning
confidence: 99%
“…12 shows the output signal follows the input "b" when the "select" is high; when the "select" is low, the output follows input "a". Simulated MUX Gate61 The XOR gate (used to construct the switching block) is drawn inFigure 4.13 and the simulated waveform is shown inFigure 4.14. The transistors are sized the same as the MUX gate.…”
mentioning
confidence: 99%