Integration of micro-cantilevers with photonic structures for mechano-optical wavelength selective devices

Abdulla, S.M. Chakkalakkal

doi:10.3990/1.9789036531764

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“…As evidenced by the time response of the bimorph, measured by laser Doppler vibrometery showing rise and fall times of 2 μs each (figure 18), the increased time delay in the optical modulation measurement is not inherent to the device but, as determined independently, introduced by the rise time of the detector. [28][29][30]…”

Section: Optical Characterizationmentioning

confidence: 99%

Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning

Abdulla

Kauppinen

Dijkstra

et al. 2011

J. Micromech. Microeng.

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This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph cantilevers equipped with tips that are self-aligned relative to the holes of the PhC modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated by surface micromachining techniques. Preliminary experiments with these devices have shown 80% throughput modulation using a square-wave drive signal of 0–8 V at 1 kHz.

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Section: Optical Characterizationmentioning

confidence: 99%