Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors

Abstract

In this communication we present the integration of graphene on the top electrode of solidly mounted resonators based on piezoelectric A1N thin films for gravimetric sensor applications. Because its particular chemical structure, graphene shows great potential as a bio-functionalization platform. However, in order to be commercially viable, direct deposition on the resonators is preferred to transfer techniques. The high temperatures involved in graphene chemical vapor deposition make this integration complex. Specially developed acoustic resonators, which can withstand high temperatures, combined with the use of multilayered top electrodes for A1N resonators, allow a successful integration of graphene. Finally, oxygen plasma treatments to optimize the creation of defects on the graphene layer can be used to firmly bond receptors on its surface.

Research on a Health Care Personnel Training Model Based on Multilayered Knowledge Mapping for the Integration of Nursing Courses and Examinations

“…The Ripple_mlp + model achieves an AUC of over 88% and an accuracy of over 80% for both sparse and dense datasets, making its overall performance relatively stable [ 27 ]. However, the sparsity of the dataset still affects the performance of the model.…”

Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors

“…We also observed that no graphene grows when the overall pressure raises above a given threshold (around 20 mTorr). A more detailed study of the influence of growth conditions on the characteristics of the graphene layers grown in our system can be found in [19].…”

Review of Gravimetric Sensing of Volatile Organic Compounds

“…26,29,129,139−143 Adding carbon nanotube "forests" to the surface of the gravimetric sensor has been shown to degrade the quality factor if its thickness is not carefully controlled, but graphene shows no indication of altering the Q of the device for thin layers. 144,145 Hybrid sensitizers where carbon nanotubes are added to other sensitizers, most commonly polymers, have been popular. 42,146−149 This approach can mitigate some of the difficulty in handling the carbon nanotubes, increase the sensitivity of the primary layer, and add selectivity to the carbon nanotubes instead of functionalization.…”

“…Fabrication and handling of graphene and carbon nanotubes can be complicated because CNTs will aggregate together and graphene will stick together in sheets . Carbon nanotubes and graphene have shown high selectivity for NH 3 , NO 2 , and O 2 , and some sensitivity for CO 2 inherently, but for VOC sensing, functionalization is often necessary. ,,,− Adding carbon nanotube ”forests” to the surface of the gravimetric sensor has been shown to degrade the quality factor if its thickness is not carefully controlled, but graphene shows no indication of altering the Q of the device for thin layers. , Hybrid sensitizers where carbon nanotubes are added to other sensitizers, most commonly polymers, have been popular. ,− This approach can mitigate some of the difficulty in handling the carbon nanotubes, increase the sensitivity of the primary layer, and add selectivity to the carbon nanotubes instead of functionalization.…”