Integration of thin film optoelectronic devices onto micromachined movable platforms

Wilkinson, S.; Kim, Y.W.; Jokerst, N.M.; Allen, Mark G.

doi:10.1109/68.324685

Search citation statements

Order By: Relevance

Paper Sections

Select...

Optics Integrated With Mechanics1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

1995

1999

Publication Types

Select...

Article4

Other1

Relationship

Self Cite0

Independent5

Authors

Journals

Cited by 8 publications

(1 citation statement)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Resonators, cantilevers, diaphragms, beams, and more complex transducer components are at hand, where the combination with optics has led to the designations micro-opto-mechanical systems (MOMS) or even micro-opto-electro-mechanical systems (MOEMS). Although some work has looked at the combination of III±V optical components with silicon micromechanics [101], the bulk of work has concentrated on Si and Si-based optics owing to the advanced state of bulk and surface micromachining using this material.…”

Section: Optics Integrated With Mechanicsmentioning

confidence: 99%