2015
DOI: 10.1016/j.snb.2014.09.054
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Integration of tungsten layers for the mass fabrication of WO3-based pH-sensitive potentiometric microsensors

Abstract: (W/WO3-Ag/AgCl) and (Pt/IrO2-Ag/AgCl) potentiometric microdevices were developed for pH measurement in liquid phase using a (Pt-Pt-Ag/AgCl) electrochemical microcells (ElecCell) silicon-based technological platform. A special emphasis was placed on the mass fabrication of the W/WO3 microelectrode using sputtering deposition and oxygen plasma processes. Compared to the Pt/IrO2-based one, the W/WO3-based microelectrodes showed lower performances regarding the pH measurement. Nevertheless, since W/WO3 microelectr… Show more

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Cited by 21 publications
(8 citation statements)
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“…MO x with micro–nano structures have been widely used in the fabrication of pH sensors due to their unique pH-sensitive properties and advantages, such as high mechanical strength, low cost, thermal stability and weather resistance [ 48 , 52 , 57 , 83 , 84 , 85 , 86 , 87 , 88 , 89 , 90 , 91 , 92 , 93 , 94 , 95 , 96 , 97 , 98 , 99 , 100 , 101 ]. MO x –based pH sensors can achieve a fast response in different environments and have the advantages of long life and easy miniaturization, which makes such sensors suitable for applications in wearable healthcare systems.…”
Section: Ph-sensitive Materials and Wearable Sensorsmentioning
confidence: 99%
“…MO x with micro–nano structures have been widely used in the fabrication of pH sensors due to their unique pH-sensitive properties and advantages, such as high mechanical strength, low cost, thermal stability and weather resistance [ 48 , 52 , 57 , 83 , 84 , 85 , 86 , 87 , 88 , 89 , 90 , 91 , 92 , 93 , 94 , 95 , 96 , 97 , 98 , 99 , 100 , 101 ]. MO x –based pH sensors can achieve a fast response in different environments and have the advantages of long life and easy miniaturization, which makes such sensors suitable for applications in wearable healthcare systems.…”
Section: Ph-sensitive Materials and Wearable Sensorsmentioning
confidence: 99%
“…This demand can be met by metal oxide semiconductors, which offer advantages such as low cost, excellent biocompatibility, and easy integration with wearable devices used in healthcare [11][12][13][14]. Several metal-oxide films are currently used as multifunctional sensing applications, such as Rh 2 O 3 [15] SnO 2 [16], WO 3 [17], IGZO [18,19], ITO [20], Ta 2 O 5 [21], MgO [22], Al 2 O 3 /SiO 2 [23], TiO 2 [24], CuO [13], ZnO [3,[25][26][27][28][29] and CoO [30,31]. Among these, ZnO has several unique features such as a wide band gap, low intrinsic carrier concentration, high maximum n-type doping, and high maximum p-type doping of 3.32 eV, < 10 6 cm −3 , 10 19 cm −3 , and 10 -17 cm −3 , respectively [32,33].…”
Section: Introductionmentioning
confidence: 99%
“…20,21 The electrode was miniaturized enough to match with the small space in biological microenvironments, such as a single cell or certain locations in tissues appears to have great advantages over other electrodes with an ordinary size. 22 Many applications have been developed based on microsensors, such as pH measurement, 23 and detection of nitric oxide, 24 glucose, 25 ascorbic acid, 26 dopamine, 27 etc. Carbon ber is one of the most promising candidate materials for microsensors due to its tiny size, sensitivity and selectivity.…”
Section: Introductionmentioning
confidence: 99%