Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips

Randjelović, Danijela; Frantlović, Miloš; Miljković, Budimir L.; Popović, B.; Jakšić, Zoran

doi:10.1016/j.vacuum.2013.07.044

Cited by 25 publications

(10 citation statements)

References 22 publications

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“…Compared to other sensor principles, this is a narrow range of pressure as there are already many suggestions for MEMS-type vacuum sensors with a pressure range over 8 orders of magnitude. However, most of the sensors presented in literature work on sensor principles that have been improved over years (Randjelović et al, 2014). The analysis of the measurements indicates that the sensitive range of the sensor could be adapted by varying the distance between substrate and grid.…”

Section: Discussionmentioning

confidence: 99%

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Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements

Giebel

Köhle

Stramm

et al. 2017

J. Sens. Sens. Syst.

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Abstract. The concept of the micro-structured vacuum sensor presented in this article is the measurement of the electrical conductivity of thinned gases in order to develop a small, economical and quite a simple type of vacuum sensor. There are already some approaches for small vacuum sensors. Most of them are based on conservative measurement principles similar to those used in macroscopic vacuum gauges. Ionization gauges use additional sources of energy, like hot cathodes, ultraviolet radiation or high voltage for example, for ionizing gas molecules and thereby increasing the number of charge carriers for measuring low pressures. In contrast, the concept discussed here cannot be found in macroscopic sensor systems because it depends on the microscopic dimension of a gas volume defined by two electrodes. Here we present the concept and the production of a micro-structured vacuum sensor chip, followed by the electrical characterization. Reference measurements with electrodes at a distance of about 1 mm showed currents in the size of picoampere and a conductivity depending on ambient pressure. In comparison with these preliminary measurements, fundamental differences regarding pressure dependence of the conductivity are monitored in the electrical characterization of the micro-structured sensor chip. Finally the future perspectives of this sensor concept are discussed.

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Section: Discussionmentioning

confidence: 99%

“…where G 0,λ denotes the electrical conductance in vacuum, k B is the Boltzmann constant and T is the temperature (Reif, 1976).…”

Section: Conductivity In Gasesmentioning

confidence: 99%

Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements

Giebel

Köhle

Stramm

et al. 2017

J. Sens. Sens. Syst.

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“…Sensor's performance is determined by several parameters such as device's responsivity [5,8] also known as heat power sensitivity [12,14] or thermopile's electrical sensitivity [10] , defined as the ratio between the thermopile output voltage and the power gradient, or as the product of the thermopile sensitivity and the thermal resistance…”

Section: Operating Principlementioning

confidence: 99%

“…Thermopile's differential temperature measurements reduce or even remove common-mode interferences such as room temperature fluctuation. In addition, thermopiles have been widely used as thermal vacuum sensor [14] and gas sensing [10,[15][16][17]. In calorimeters, the thermal resistance of thermal sensor converts the heat released by an exothermic chemical reaction into a temperature gradient [17].…”

Section: Introductionmentioning

confidence: 99%

Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor

Franco

Treviño

Figueras

et al. 2018

Superficies y Vacio

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This document presents the finite element modeling using ANSYS to obtain the thermal resistance of a MEMS thermal sensor. Additionally, the document describes a thermoelectrical characterization to find the sensor performance parameters. For modeling purposes, we divided the thermal sensor into four different thickness zones. We analyzed three different models, the first includes all materials layers, the second involves an equivalent thermal conductivity and an equivalent thickness for each zone, and the proposed model besides using an equivalent thermal conductivity by zone also considers the same thickness for all zones to reduce simulation time and to optimize thermal sensor design parameters. The first model evaluates three different boundary conditions, while the second and third models consider two different thermopile wide strips. The thermal resistance of the proposed model has a relative error of 11% in relation to the experimental value. The model, considering all layers and heat power applied to the surface as boundary conditions, has the lowest error (9%), while models considering the thermopile strips width have shown a higher error, 67%. As a result, the proposed model for heat transfer analysis simplifies complex geometries and reduces simulation time.

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“…Der große Vorteil dieser Art der Vakuummessung ist der große Messbereich. Der Prozessaufwand zur Herstellung dieser Sensoren ist aber vergleichsweise groß [4,5]. Viele dieser MEMS-Sensoren arbeiten nach Messprinzipien, die von makroskopischen Messgeräten durch Miniaturisierung auf die Mikrosensoren übertragen wurden [6].…”

Section: Introductionunclassified