According to the demand of increasing storage density for the magnetic data storage, a contact recording system is proposed, in which the head constantly makes contact with the disk surface during read/write cycles. In this system a stronger lubricant film for head disk interface (HDI) is required. In a conventional dip-coating method, which is carried out under atmospheric conditions, however, a fresh diamond like carbon (DLC) surface adsorbs several contaminations from the air and a strong lubricant layer is difficult to form on the DLC surface. In this study, a DLC layer is coated on a Si substrate by a plasma chemical vapor deposition (PCVD) method, then the DLCcoated Si sample is transferred to another vacuum chamber without being exposed to the atmosphere, and a perfluoropolyether (PFPE) lubricant film is vapor-deposited on the sample. The sample is analyzed by XPS and compared to the surface on which the PFPE lubricant is dip-coated. It is noted that both samples are rinsed after the coatings and the loose PFPE molecules are washed away. A thicker bonded layer of PFPE is formed on the DLC surface treated by vapor deposition. A tribological wear test is also carried out using a pin-on-disk tribotester. Both results show that the tribological characteristics are improved by the vapor deposition of PFPE molecules compared to the dip-coating method.