2020
DOI: 10.1088/1361-6595/ab8177
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Interaction of biased electrodes and plasmas: sheaths, double layers, and fireballs

Abstract: Biased electrodes are common components of plasma sources and diagnostics. The plasma-electrode interaction is mediated by an intervening sheath structure that influences properties of the electrons and ions contacting the electrode surface, as well as how the electrode influences properties of the bulk plasma. A rich variety of sheath structures have been observed, including ion sheaths, electron sheaths, double sheaths, double layers, anode glow, and fireballs. These represent complex self-organized response… Show more

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Cited by 61 publications
(59 citation statements)
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References 369 publications
(939 reference statements)
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“…After passing its peak, the local electric fields enhance the ionizing collisions close to the target by one order of magnitude, allowing for a space-charge inversion to a net positive charge and corresponding local rise of the plasma potential. Such features are likewise observed in double-layers and anode spots in the absence of magnetic fields [27,28], where oscillations similar to those herein have been measured and explained as the double layer stabilization in the electron sheath. We also note that the double layer potential drop between the region close to the target and the bulk plasma is slightly higher than the ionization potential of Ar [29].…”
Section: Discussionsupporting
confidence: 87%
“…After passing its peak, the local electric fields enhance the ionizing collisions close to the target by one order of magnitude, allowing for a space-charge inversion to a net positive charge and corresponding local rise of the plasma potential. Such features are likewise observed in double-layers and anode spots in the absence of magnetic fields [27,28], where oscillations similar to those herein have been measured and explained as the double layer stabilization in the electron sheath. We also note that the double layer potential drop between the region close to the target and the bulk plasma is slightly higher than the ionization potential of Ar [29].…”
Section: Discussionsupporting
confidence: 87%
“…The double layer potential scales pro-portional to the ion beam energy, implying that the DL is due to ion beam stagnation. This is fundamentally different from a sheath expansion due to ionization of neutrals, called a fireball [18]. The potential drop of fireball double layers is close to the ionization energy level necessary to balance the particle inflow and outflow.…”
Section: Ion Injection Into Electron Rich Sheath Producing Sheath mentioning
confidence: 95%
“…The size, location and stability of the double layer depends on the balance between production and losses. For plane electrodes the shape of the fireball is usually spherical [16,18].…”
Section: Electron-rich Sheaths Developing Into Fireballsmentioning
confidence: 99%
“…The ion creation results in broadening the potential profile until forming a double layer at the boundary as a visible "fireball" or "anode glow" [13,14,15,16]. Various instabilities arise, such as fireball relaxation instabilities and electron transit time instabilities [17,18]. In magnetized plasmas electron rich sheaths can rotate due to E × B 0 drifts which forms electron drift wave eigenmodes [19].…”
Section: Introductionmentioning
confidence: 99%