Interaction of injected dust particles with metastable neon atoms in a radio frequency plasma

Key words Escape factor, rf discharge in argon, metastable state, emission spectroscopy, TDLAS.Reabsorption of the emitted light in the plasma volume has recently been used for density measurements of the lower level of optical transition by interpretation of emission spectra employing the escape factor concept. Following this idea, we apply this method to a radio-frequency argon discharge. By revising the theoretical background, the impact of different assumptions on excited species spatial distributions is investigated. Comparing with 1s5 and 1s4 concentrations obtained with laser absorption spectroscopy, the range of applicability of those assumptions is analyzed at different discharge parameters.

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“…The experiments were performed in the PULVA reactor [10,22], see figure 3. It's main part is a vacuum chamber of 40 cm diameter.…”

Section: Methodsmentioning

confidence: 99%

Application of the escape factor method for determination of excited states densities in a low‐pressure argon radio‐frequency discharge

Sushkov

Hippler

2013

Contrib. Plasma Phys.

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“…In papers [2]- [7], the influence of dusty particles on excited atoms density has been investigated in Ne and Ar RF discharge. The effect value and even its sign depend on the gas, particle size, and discharge conditions.…”

mentioning

confidence: 99%

Spectral Study of Glow Discharge With Dusty Structures

Pikalev

Kobylin

Semenov

2018

IEEE Trans. Plasma Sci.

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Abstract-We present the results of the experimental study of the influence of dusty structures on plasma. We have studied glow discharges in neon and argon with Al2O3 polydisperse particles and melamine-formaldehyde monodisperse particles with the diameter of 4.83 µm. We used optical emission spectroscopy and laser-induced fluorescence methods to measure shift of excited atoms populations, which led to similar results. In most cases, the population change was negligible as compared to the inaccuracy. Al2O3 particles in argon formed large structures which caused dramatic redistribution of radiation. In this case, spectral lines and fluorescence became 9-50% weaker at the tube center after dusty structure formation. It might be accounted for by a decrease of electron density due to recombination on the surfaces of the particles. Near the tube wall, the radiation became brighter due to an electron temperature increase. Photographs of the discharge allowed us to calculate the radial distribution of the population shift.

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“…The surface processes also influence the energy balance of the substrate during plasma treatment. Note that the role of metastable atoms or molecules is not mentioned in the following sections because measurements have shown that their contribution is about 3.10 −4 mW/cm 2 and, thus, negligible in comparison to other contributions in typical low temperature low pressure plasmas [78]. However, they may play an important role at higher pressures, but up to now there are no results known to the authors.…”

Section: Surface Processesmentioning

confidence: 94%

Calorimetric Probes for Energy Flux Measurements in Process Plasmas

2014

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This chapter gives an overview of the method of calorimetric probes which are used for characterizing the interaction between low-temperature plasmas and substrates in materials processing. Although the focus is on low-temperature nonequilibrium plasmas most of the concepts can also be transferred to thermal plasmas or are in fact adopted from fusion research. An introductory section showing the importance and complexity of plasma wall interactions is followed by a section providing an overview and comparison of various probe concepts, which have been developed in the last decades. Special focus is on the type of probes which are similar to the probes used by J.A. Thornton (In fact, Thornton was not the first, to use this type of probe. From his work from 1978 [1], one can follow the citations back to the work of Jackson in 1969, who used equation (6.7) for the determination of the power dissipated by a copper block located at substrate position in a sputtering discharge [2]) who was one of the pioneers connecting plasma characteristics with resulting surface properties. Thereafter, a short section gives a basic overview of the different contributions to the total energy influx and which are of importance for the plasma wall interaction. The last section shows different examples of applications of calorimetric probes. It demonstrates the applicability and flexibility of these types of probes for characterization of different low-temperature plasmas. The examples

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Interaction of injected dust particles with metastable neon atoms in a radio frequency plasma

Cited by 26 publications

References 22 publications

Application of the escape factor method for determination of excited states densities in a low‐pressure argon radio‐frequency discharge

Application of the escape factor method for determination of excited states densities in a low‐pressure argon radio‐frequency discharge

Spectral Study of Glow Discharge With Dusty Structures

Calorimetric Probes for Energy Flux Measurements in Process Plasmas

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