2001
DOI: 10.1002/sia.945
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Intercomparison of methods for separation of REELS elastic peak intensities for determination of IMFP

Abstract: The consistency and accuracy of inelastic electron mean free paths (IMFPs) determined from comparison of the intensity of elastically reflected electrons with theoretical calculations were studied. The variation with experimental geometry, spectrometer energy resolution and the procedure for background subtraction was studied. Four different types of spectrometers -double pass cylindrical mirror analyser (CMA) preretarded CMA, hemispherical analyser (HSA) and retarding field analyser (RFA) -with widely differe… Show more

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Cited by 15 publications
(11 citation statements)
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“…A systematic study of the effect of background subtraction on the calculated IMFP was carried out recently in another round-robin study. 16 Four background subtraction methods (Shirley,17 linear, 1 Tougaard 18 and ELPSEP 16 ) were applied to isolate the elastic peak intensity from the reflected electron spectra. The main conclusion of the study was that the Tougaard background subtraction method gives the best result; thus laboratories B, D and W used this method to remove the background.…”
Section: Evaluation Procedures Elastic Peak Electron Spectroscopy Bacmentioning
confidence: 99%
“…A systematic study of the effect of background subtraction on the calculated IMFP was carried out recently in another round-robin study. 16 Four background subtraction methods (Shirley,17 linear, 1 Tougaard 18 and ELPSEP 16 ) were applied to isolate the elastic peak intensity from the reflected electron spectra. The main conclusion of the study was that the Tougaard background subtraction method gives the best result; thus laboratories B, D and W used this method to remove the background.…”
Section: Evaluation Procedures Elastic Peak Electron Spectroscopy Bacmentioning
confidence: 99%
“…Background of the EPES spectra was subtracted by the elastic peak separation procedure (ELPSEP) method 34 prior to further processing and elaboration.…”
Section: Methodsmentioning
confidence: 99%
“…The IMFP values shown in Fig. 5 are taken from the compilation published by Tougaard et al 35 (the CMA data).…”
Section: Calculation Of the Imfpmentioning
confidence: 99%
“…These options were selected on the basis of good performance in the interlaboratory study of the background removal methods. 35 Finally, the user has a possibility to create and save different files with calculated information.…”
Section: Software Packagementioning
confidence: 99%
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