Abstract:Interdiffusion in amorphous AlxZr1−x compositionally modulated multilayers was investigated by Auger electron spectroscopy sputter-depth profiling. Microstructural characterisation was performed by X-ray diffraction and cross-sectional transmission electron microscopy. The temperature-dependent chemical diffusion coefficient could be deduced at a series of temperatures in the range of 356 °C to 415 °C and was found to be weakly dependent on composition. The activation enthalpy for the chemical diffusion coeffi… Show more
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