2007
DOI: 10.1016/j.sna.2006.04.008
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Interdigital capacitive strain gauges fabricated by direct-write thermal spray and ultrafast laser micromachining

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Cited by 51 publications
(21 citation statements)
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“…If the fingers of the sensor are displaced relative to each other by the component load, this results in a capacitive change ΔC . This is approximately proportional to the strain ε [230] (Figure 28).…”
Section: Hot Gas Component Monitoringmentioning
confidence: 99%
“…If the fingers of the sensor are displaced relative to each other by the component load, this results in a capacitive change ΔC . This is approximately proportional to the strain ε [230] (Figure 28).…”
Section: Hot Gas Component Monitoringmentioning
confidence: 99%
“…1.1.1.2.5 Thermal spray, Cold gas deposition and Sol-gel Thermal spray is a process which melts wire, rod or powder feedstock using a flame or plasma arc to produce molten droplets which are then accelerated onto a substrate to form a coating. It has been demonstrated to be capable of producing resolutions on the order of 100 microns [67,68]. It can be used to deposit metallic, polymeric or ceramic materials.…”
Section: Sshangmentioning
confidence: 99%
“…A short pulse laser of the order of femtoseconds or picoseconds can be used in a process that is termed ablation or spallation depending on the exact mechanism involved. A constant stream of pulses of a specific wavelength and frequency are incidented upon the material to be removed/deposited, the high peak energy strips off the electrons of the material under irradiation, the remaining positively charged lattice than expels and explodes [68,71,105,106]. This process allows efficient small area precision machining on almost any surface with virtually no heat affected zones, hence also referred to as cold machining [94,[107][108][109].…”
Section: Laser Ablationmentioning
confidence: 99%
“…It enables high throughput and cost‐effective ceramic coating over a large area on a wide variety of substrates. In addition to the applications in forming protective coatings, thermal spray process has been applied for the fabrication of some electronic components and sensor devices made of ceramics, including strain gauge, and humidity sensors . Research efforts have also been made for deposition of PZT‐based piezoelectric coatings by thermal spray .…”
Section: Introductionmentioning
confidence: 99%