Interdisciplinary characterization of sandwiched SiGe thin layers grown by molecular beam epitaxy

Feng, Zhi Gang; Watt, F.; Lee, K. K.; Wee, Aileen; Hng, Huey Hoon; Arbet-Engels, V.; Karunasiri, R. P. G.; Wang, K. L.; Williams, K. P. J.

doi:10.1109/edms.1994.863768

International Electron Devices and Materials Symposium

DOI: 10.1109/edms.1994.863768

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Interdisciplinary characterization of sandwiched SiGe thin layers grown by molecular beam epitaxy

Zhi Gang Feng

F. Watt

K. K. Lee

et al.

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Interdisciplinary characterization of sandwiched SiGe thin layers grown by molecular beam epitaxy

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