In the present study, the high-temperature creep behavior of three SiOC glass ceramics with different phase compositions are compared by the authors. All three SiOC glass ceramics have a vitreous silica matrix in common, but comprise different homogeneously dispersed phases: 1) only spherical β-SiC nanoparticles (sample denoted hereafter SiC/SiO 2 ), 2) only high-aspect ratio sp 2 -hybridized carbon (i.e., C/SiO 2 ), and 3) both phases (SiC and segregated carbon, i.e., C/SiC/SiO 2 ). Compression creep experiments are performed at temperatures in the range between 1100 and 1300 C and true stresses of 50 to 200 MPa. The determined activation energy for creep of the SiOC glass ceramics of around 700 kJ mol À1 is independent of the phase composition. A stress exponent value of approximately 2 indicates an interface-controlled deformation mechanism. All SiOC glass ceramics exhibit significantly higher creep viscosities than that of vitreous silica. Surprisingly, the spherical β-SiC nanoparticles have a higher impact on the effective creep viscosities of SiOC as compared to that of the high-aspect ratio segregated carbon phase. It is concluded that this originates from the β-SiC/silica and C/silica interfaces, which have different effects on the creep behavior of silicon oxycarbide-based glass ceramics.