separation and storage, or catalysis. [3][4][5] In addition, there is tremendous potential in the use of MOF thin films as membranes, active sensor coatings, high-performance dielectrics, and other microelectronic applications that could benefit from the integration of porous functional materials. [6] Routine characterization of MOF powders typically involves N 2 physisorption to investigate their porosity and specific surface area. [7] The characterization of MOF thin films is more challenging due to the low amount of material in sub-micrometer films (Table 1), especially compared to the mass and volume of the substrate (e.g., a Si wafer), and often requires dedicated methods and instruments. Therefore, often only qualitative porosity characterization has been performed, e.g., through intercalation of fluorescent dyes or other labels. [8,9] Thus far, quantitative porosimetry of MOF films has relied on physisorption, by measuring the adsorbed quantity of a probe molecule through manometric/volumetric (e.g., Kr physisorption, KrP), gravimetric (e.g., quartz crystal microbalance, QCM) or spectroscopic (e.g., ellipsometry, EP) methods. [10] When performed as a function of the adsorptive relative pressure at Thin films of crystalline and porous metal-organic frameworks (MOFs) have great potential in membranes, sensors, and microelectronic chips. While the morphology and crystallinity of MOF films can be evaluated using widely available techniques, characterizing their pore size, pore volume, and specific surface area is challenging due to the low amount of material and substrate effects. Positron annihilation lifetime spectroscopy (PALS) is introduced as a powerful method to obtain pore size information and depth profiling in MOF films. The complementarity of this approach to established physisorptionbased methods such as quartz crystal microbalance (QCM) gravimetry, ellipsometric porosimetry (EP), and Kr physisorption (KrP) is illustrated. This comprehensive discussion on MOF thin film porosimetry is supported by experimental data for thin films of ZIF-8.