The morphology of micro-and nanodroplets and thin films of ionic liquids (ILs) prepared through physical vapor deposition is presented. The morphology of droplets deposited on indium-tin-oxide-coated glass is presented for the extended 1-alkyl-3-methylimidazolium bis(trifluoromethylsulfonyl)imide ([CnC1im][Ntf2]; n= 1-8) series, and the results show the nano-structuration of ILs. The use of in-vacuum energetic particles enhances/increases the nanodroplets mobility/coalescence mechanisms and can be a pathway to the fabrication of thin IL films. Ionic liquids (ILs) are a family of materials that offer a range of properties that can be adjusted to optimize their performance in a diversity of technological applications. [1-3] ILs share common characteristics, such as ionic conductivity, good thermal stability, and extremely low vapor pressure at room temperature. [4-6] In recent years, extensive studies of the thermo-physical properties of ILs have shown that almost none of these properties are shared across the IL range due to structural/nanostructural modifications. [7-9] ILs are becoming particularly attractive for many applications, such as solvents for electro-chemistry (electrically conducting fluids, electrolytes), sealants, chemical industry, gas handling, pharmaceuticals, cellulose processing, dye-sensitized solar cells, waste recycling, batteries, dispersion of nanomaterials, and electrode-electrolyte interfaces in high-vacuum systems. [10-15] Recently, the liquid/vacuum and liquid/solid interfaces of ILs have been of great relevance for most of the above-mentioned applications, and model surface studies and molecular orientation/ordering investigations of ILs have been performed on surfaces with different chemical properties: Au, Ni, silica, graphene, alumina, glass, and mica. [16-20] In some cases, thin films of ILs have been prepared by using impregnation techniques with solutions of ILs in volatile solvents, followed by solvent removal by evaporation. Thus, nanostructures of ILs can be prepared by spin/dip-coating methods and the films have low thicknesses and exceptional lubrication characteristics. [20] In recent years, the focus has been on physical vapor deposition (PVD) of ILs on different surfaces [16, 18, 19]