Perpendicular orientation of lamellar microdomains in a high interaction parameter block copolymer was obtained within high aspect ratio gratings functionalized with a preferential sidewall brush. The experiments used polystyrene-blockpolydimethylsiloxane with molecular weight 43 kg/mol within trenches made using interference lithography. The perpendicular alignment was obtained for both thermal and solvent annealing, using three different solvent vapors, for a range of film thicknesses and trench widths. A Pt layer at the base of the trenches avoided the formation of a wetting layer, giving perpendicular orientation at the substrate surface. The results are interpreted using self-consistent field theory simulation and a Ginzburg-Landau analytic model to map the energies of lamellae of different orientations as a function of the grating aspect ratio and the surface energies of the sidewalls and top and bottom surfaces. The model results agree with the experiment and provide a set of guidelines for obtaining perpendicular microdomains within topographic features.
Keywords: Block Copolymer, self-assembly, perpendicular orientation, graphoepitaxy, solvent annealing, thermal annealing
TOC Graphic Article TextBlock copolymer (BCP) films have shown great utility in several technological applications including nanolithography for fabrication of integrated circuits, 1,2 magnetic storage media, 3,4 or sensors; 5-7 and in photonic crystals, [8][9][10] photovoltaics [11][12][13] and separation membranes, 14,15 as well as for making 3-dimensional nanostructures. 16 To obtain microphase separation at sub-10nm length scales, a high Flory-Huggins interaction parameter (χ) is desirable. However, high-χ BCPs usually exhibit large differences in surface affinity between the two blocks, leading to the formation of a surface layer of the lower surface energy block and favoring in-plane orientation of lamellae or cylindrical microdomains, 17 which is exacerbated if the substrate is also preferential to one block. This is undesirable in applications where through-thickness features are required, such as porous membranes or high-aspect-ratio structures for pattern transfer. Perpendicular (vertical) orientation of block copolymer microdomains can be produced by several methods, including i) a neutral top coating and neutral substrate brush that minimize the interfacial energy difference between the blocks at the air and substrate interfaces respectively; [17][18][19] ii) a specifically designed molecular architecture 20-22 such as a brush or multi-arm BCP that can form microdomains oriented out-of-plane without modification of the underlying substrate, due to the entropic penalty associated with the packing of the side chains; 22 and iii) modifying the annealing process to use a solvent concentration gradient, 18,23 temperature gradient, 24,25 electric 26 or magnetic field 27 , chemoepitaxy and/or graphoepitaxy, 28 and electrospray deposition 29 to induce out-ofplane alignment of self-assembled microdomains. These methods have ...