Interference signal demodulation for nanopositioning and nanomeasuring machines

Hausotte, Tino; Percle, B; Gerhardt, Uwe; Dontsov, Denis; Manske, Eberhard; Jäger, Gerd

doi:10.1088/0957-0233/23/7/074004

Cited by 38 publications

(34 citation statements)

References 27 publications

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“…All three parts are synchronized by a 50-MHz digital oscillator. The phase meter operation is performed via a fast look-up table (LUT) acting 4096 times to interpolate the 2π phase angle [ 20 ]; its resolution amounts to 0.077 nm in the case of a single-pass plane mirror interferometer and fringe subdivision noise for acting 4096 times is approximately 0.038 nm. The loop time for a complete procedure after cyclic error compensation is 500 ns, and the cyclic error compensation process except for the ADC process took 160 ns.…”

Section: Resultsmentioning

confidence: 99%

Compensation for the Variable Cyclic Error in Homodyne Laser Interferometers

Zhu

Guo

et al. 2015

Sensors

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This paper presents a real-time method to compensate for the variable cyclic error in a homodyne laser interferometer. The parameters describing the quadrature signals of the interferometer are estimated using simple peak value detectors. The cyclic error in the homodyne laser interferometer was then corrected through simple arithmetic calculations of the quadrature signals. A field programmable gate array was utilized for the real-time compensation of the cyclic error in a homodyne laser interferometer. The simulation and experimental results indicated that the proposed method could provide a cyclic error that was fixed without compensation down to a value under 0.6 nm in a homodyne laser interferometer. The proposed method could also reduce the time-varying cyclic error to a value under 0.6 nm in a homodyne laser interferometer, in contrast to the equivalent value of 13.3 nm for a conventional elliptical fitting method.

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Section: Resultsmentioning

confidence: 99%

Compensation for the Variable Cyclic Error in Homodyne Laser Interferometers

Zhu

Guo

et al. 2015

Sensors

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“…In order to achieve a measurement uncertainty in the low nanometre level the complete machine as well as the environmental disturbances must be described precisely. A vectorbased uncertainty model has turned out to be a very successful way to find the model equations for nano measuring machines [7,8]. Thereby, the difference in position (the distance) between two measured points is described by two closed vector chains.…”

Section: Uncertainty Modelmentioning

confidence: 99%

Coordinate transformation and its uncertainty under consideration of a non-orthogonal coordinate base

Fern

Füßl

Eichfelder

et al. 2021

Meas. Sci. Technol.

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Nanopositioning and nanomeasuring machines are 3D coordinate measuring systems with nanometer precision at measurement volumes in the cubic centimeter range whose coordinate base is formed by an interferometer system with a common mirror corner. This mirror corner shows a typical deviation from the orthogonal coordinate base of up to 17 µrad with an uncertainty of 0.07 µrad. After a brief description of nanomeasuring and nanopositioning machines, a transformation model from the skewed coordinate system into the orthogonal coordinate system is determined. Starting from this complete transformation model, the result of model simplifications on the transformation behaviour is analysed and discussed. A GUM-based uncertainty calculation shows that the linearised coordinate transformation does not increase the error and the uncertainty significantly.

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“…The displacement of the measurement mirror can be determined according to the interference signal. In order to determine the change of displacement direction, the signal is separated into two parts with a phase difference of 90° and detected by two photoelectric detectors, respectively [ 20 , 22 , 23 , 24 ].…”

Section: Laser Interferometermentioning

confidence: 99%

A Method for Measurement of Nonlinearity of Laser Interferometer Based on Optical Frequency Tuning

Zhu

Ren³

et al. 2017

Sensors

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Abstract:A method for measuring the nonlinearity of laser interferometer using optical frequency tuning technique is presented in this paper. The basic principle of this method is to make the fractional part of an interference fringe change by tuning the laser frequency and determining the nonlinearity of interferometer by comparing the fractional fringe change measured by the interferometer to that calculated from the laser frequency change. An experimental interferometric system with a wavelength tunable laser source is set up and the nonlinearity of the interferometer is measured. Since it does not require the precise displacement mechanism to produce the optical path difference change, this method is more convenient to use and may achieve a higher accuracy than the conventional measurement methods. The nonlinearity of the arbitrary interferometric phase can be measured by changing the laser frequency with this method. Experiments results have shown that the repeatability of nonlinearity measurement is less than 0.2 nm. This method can be applied to interferometry-based high precision dimensional measurements, such as coordinate measurement and displacement sensor calibration.

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Interference signal demodulation for nanopositioning and nanomeasuring machines

Cited by 38 publications

References 27 publications

Compensation for the Variable Cyclic Error in Homodyne Laser Interferometers

Compensation for the Variable Cyclic Error in Homodyne Laser Interferometers

Coordinate transformation and its uncertainty under consideration of a non-orthogonal coordinate base

A Method for Measurement of Nonlinearity of Laser Interferometer Based on Optical Frequency Tuning

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