Interferometric characterization of MOEMS devices in cryogenic environment for astronomical instrumentation

Zamkotsian, Frédéric; Grassi, Emmanuel; Waldis, Severin; Barette, Rudy; Lanzoni, Patrick; Fabron, Christophe; Noell, Wilfried; Rooij, Nico de

doi:10.1117/12.768410

Cited by 13 publications

(6 citation statements)

References 3 publications

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“…It has the ability to use a compact cryo-vacuum chamber designed for reaching 10-6 mbar and 160K, in front of our custom interferometer. This set-up is able to measure performance of a deformable mirror at actuator/segment level and at the entire mirror level, with a lateral resolution of 2µm and a sub-nanometer z-resolution [28]. PSI allows the shape of the segmented surface to be restored with very fine spatial resolution, thus showing the internal deformation within the segments.…”

Section: Phase Shifting Interferometry (Psi)mentioning

confidence: 99%

High-dynamic range segmented mirror metrology by two-wavelength PISTIL interferometry: demonstration and performance

Rouzé¹,

Primot²,

Lanzoni³

et al. 2020

Opt. Express

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The PISTIL interferometry has been recently developed for the wavefront sensing of phase delays (pistons) and tilts of segmented surfaces, used in many domains such as astronomy, high-power lasers or ophthalmology. In this paper, we propose a two-wavelength version of this interferometer developed to bypass the dynamic range limitation of the ambiguous 2π phase wrapping. Principle of the technique is presented, along with experimental results obtained with a demonstration deformable mirror PTT-111 from Iris AO. Above wavelength pistons are measured with a precision and accuracy below λ/100, making the two-wavelength PISTIL interferometry a high-dynamic range technique. To prove these performances, we successfully compare the results in terms of precision and accuracy with those of a reference phase-shifting Interferometer, from a blind experimentation.

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Section: Phase Shifting Interferometry (Psi)mentioning

confidence: 99%

High-dynamic range segmented mirror metrology by two-wavelength PISTIL interferometry: demonstration and performance

Rouzé¹,

Primot²,

Lanzoni³

et al. 2020

Opt. Express

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“…As we are using low coherence interferometry, the fringe contrast can be kept at maximum by balancing the optical path in the reference arm of the interferometer with a compensation plate identical to the chamber window. In our set-up, the chamber window and the compensation plate have been manufactured at the same time in the same glass material [ 13 ].…”

Section: Cryogenic Interferometric Test Set-upmentioning

confidence: 99%

Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results

et al. 2017

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Micro-opto-electro-mechanical systems (MOEMS) Deformable Mirrors (DM) are key components for next generation optical instruments implementing innovative adaptive optics systems, both in existing telescopes and in the future ELTs. Characterizing these components well is critical for next generation instruments. This is done by interferometry, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo. We use a compact cryo-vacuum chamber designed for reaching 10–6 mbar and 160 K in front of our custom Michelson interferometer, which is able to measure performance of the DM at actuator/segment level and at the entire mirror level, with a lateral resolution of 2 µm and a sub-nanometer z-resolution. We tested the PTT 111 DM from Iris AO: an array of single crystalline silicon hexagonal mirrors with a pitch of 606 µm, able to move in tip, tilt, and piston (stroke 5–7 µm, tilt ±5 mrad). The device could be operated successfully from ambient to 160 K. An additional, mainly focus-like, 500 nm deformation of the entire mirror is measured at 160 K; we were able to recover the best flat in cryo by correcting the focus and local tip-tilts on all segments, reaching 12 nm rms. Finally, the goal of these studies is to test DMs in cryo and vacuum conditions as well as to improve their architecture for stable operation in harsh environments.

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“…The micromirrors could be successfully actuated before, during and after cryogenic cooling at 92K (Fig. 4) [7]. We could measure the surface quality of the gold coated micromirrors at room temperature, below 100K and being actuated: there is a slight increase of the deformation from 35 nm to 50nm PtV, due to CTE mismatch between silicon and gold layer (Fig.…”

Section: Programmable Slit Masksmentioning

confidence: 99%

MOEMs devices designed and tested for future astronomical instrumentation in space

Zamkotsian¹,

Lanzoni²,

Noell³

et al. 2017

International Conference on Space Optics — ICSO 2008

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Next generation of astronomical instrumentation for space telescopes requires Micro-Opto-ElectroMechanical Systems (MOEMS) with remote control capability and cryogenic operation. MOEMS devices have the capability to tailor the incoming light in terms of intensity and object selection with programmable slit masks, in terms of phase and wavefront control with micro-deformable mirrors, and finally in terms of spectrum with programmable diffraction gratings. Applications are multi-object spectroscopy (MOS), wavefront correction and programmable spectrographs. We are engaged since several years in the design, realization and characterization of MOEMS devices suited for astronomical instrumentation.

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Interferometric characterization of MOEMS devices in cryogenic environment for astronomical instrumentation

Cited by 13 publications

References 3 publications

High-dynamic range segmented mirror metrology by two-wavelength PISTIL interferometry: demonstration and performance

High-dynamic range segmented mirror metrology by two-wavelength PISTIL interferometry: demonstration and performance

Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results

MOEMs devices designed and tested for future astronomical instrumentation in space

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