2014
DOI: 10.1063/1.4897966
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Intermodulation electrostatic force microscopy for imaging surface photo-voltage

Abstract: We demonstrate an alternative to Kelvin Probe Force Microscopy (KPFM) for imaging surface potential. The open-loop, single-pass technique applies a low-frequency AC voltage to the atomic force microscopy tip while driving the cantilever near its resonance frequency. Frequency mixing due to the nonlinear capacitance gives intermodulation products of the two drive frequencies near the cantilever resonance, where they are measured with high signal to noise ratio. Analysis of this intermodulation response allows f… Show more

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Cited by 42 publications
(43 citation statements)
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“…Surface potential imaging is acquired using intermodulation electrostatic force microscopy (ImEFM, Intermodulation Products) [26]. ImEFM is an alternative to Kelvin probe force microscopy, which uses resonance to enhance the force sensitivity of the cantilever (MikroMasch HQ:NSC15/Pt), allowing for a much improved signal-tonoise ratio in a given measurement bandwidth (inverse of the signal integration time at each pixel).…”
Section: Methodsmentioning
confidence: 99%
“…Surface potential imaging is acquired using intermodulation electrostatic force microscopy (ImEFM, Intermodulation Products) [26]. ImEFM is an alternative to Kelvin probe force microscopy, which uses resonance to enhance the force sensitivity of the cantilever (MikroMasch HQ:NSC15/Pt), allowing for a much improved signal-tonoise ratio in a given measurement bandwidth (inverse of the signal integration time at each pixel).…”
Section: Methodsmentioning
confidence: 99%
“…342 Ongoing research is devoted to enhancing the time resolution, because the scan speed of FM mode is slow 343 and AM mode measurements are burdened with artifacts, such as the stray capacitance effect 344 and interfering signals, leading to topographical coupling. 345,346 Several approaches try to couple the lateral resolution and reproducibility of FM mode KPFM with enhanced time resolution similar to AM mode KPFM, such as time-resolved electrostatic force microscopy, pump-probe KPFM, 347 general acquisition mode, 348 open loop (OL) KPFM 349 and Heterodyne (H) KPFM. 350 For example, H-KPFM improved the scan rate while maintaining the spatial resolution and voltage sensitivity comparable to FM-KPFM.…”
Section: Combination Of Afm With Kelvin Methods -Kelvin Probe Force MImentioning
confidence: 99%
“…Для проведения многих исследований в микроэлектронике, биологии, химии и медицине необходим высокочувствительный неразрушающий анализ пространственного распределения профиля электрического потенциала с высоким пространственным и полевым разрешением. К настоящему времени известны десятки методик сканирующей зондовой микроскопии (СЗМ) для измерения электрических свойств твердотельных или мягких поверхностей [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. Электростатическая силовая микроскопия (EFM) и силовая микроскопия зонда Кельвина (KFM) основаны на эффекте электростатического взаимодействия между смещенным зондом и образцом для расчета количественного значения электрического потенциала.…”
Section: Introductionunclassified