In this contribution we demonstrate both experimentally and theoretically the possibility to control the profile of internal electric field by compensation of the space charge formed by carriers trapped at deep levels Q T with space charge present due to band bending at the metal/CdTe interface Q M . The demonstrated mechanism represents a promising way to decrease the problems associated with charge collection efficiency in CdTe x-ray detectors operated at high fluxes of x-ray photons. © 2011 American Institute of Physics. ͓doi:10.1063/1.3598414͔ Accumulation of space charge at deep levels resulting in deformation of internal electric field represents one of the main factors affecting the charge collection efficiency in CdTe and CdZnTe x-ray and gamma ray semiconductor detectors. The effect of time dependent change in charge collection efficiency, known as polarization, has been studied for a long time. [1][2][3][4][5][6] This effect is a result of screening of the electric field by space charge formed due to band bending at contacts with Schottky barriers and takes place even without any radiation. Bale and Szeles 7 have shown, that deformation of the internal electric field profile can be observed at high radiation fluxes even in samples with Ohmic contacts. This type of polarization represents a significant problem in development of semiconductor radiation sensors for applications in computed tomography, where fluxes of x-ray photons up to 10 8 mm −2 s −1 are required.The electrons and holes are trapped during drift to the electrodes and form negative space charge below the anode and positive space charge below the cathode. The electric field profile has a minimum, called the pinch point, 7 which can evolve into a dead layer at very high fluxes, or in the presence of deep levels with a high concentration. 8 Weakening of the electric field in certain parts of the detector inevitably results in an increase in the collection time of the carriers. If the collection time becomes comparable or longer than the trapping times at dominant deep levels, the charge collection efficiency will decrease. It is therefore desirable to operate the detector with constant electric field or with such a profile where the electric field deformation is weak, so that the trapping time remains longer than collection time throughout the detector.In this contribution we demonstrate both experimentally and theoretically the possibility to control the profile of the internal electric field by compensation of the space charge formed by carriers trapped at deep levels Q T with space charge present due to band bending at the metal/CdTe interface Q M .The samples used in this study were fabricated from semi-insulating CdTe:In grown by the Vertical Gradient freeze method in the Institute of Physics, Charles University in Prague. The resistivity of the samples was 3 -5 ϫ 10 9 ⍀ cm. The crystal exhibits relatively good charge collection efficiency of electrons with a mobility-lifetime product e ϳ 10 −3 cm 2 / V. Room temperature thermoelectric ...