Internally Oxidized Ru–Zr Multilayer Coatings

Chen, Yung-I; Lu, Tso-Shen; Zheng, Zhi-Ting

doi:10.3390/coatings7040046

Cited by 8 publications

(3 citation statements)

References 35 publications

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“…Pure metal targets of Ru (99.95%), Al (99.999%), and Ti (99.995%) with diameters of 50.8 mm each were adopted as source materials for sputtering ( Figure 1). The sputter guns were inclined to focus plasma on the circular track of the substrate holder, which resulted in cyclical gradient concentration deposition [21,23,24]. The cosputtering processes for fabricating multilayered thin films were described in detail in a previous study [23].…”

Section: Methodsmentioning

confidence: 99%

Thermal Stability of Ru–Al Multilayered Thin Films on Inconel 617

Chen

Zheng

Jhang

2018

Metals

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Ru-riched and equiatomic Ru-Al multilayered thin films were fabricated on Si and Inconel 617 substrates. These thin films exhibited a multilayered structure that is caused by stacking cyclical gradient concentration through cosputtering. X-ray diffraction analysis indicated that the as-deposited Ru-Al multilayers comprised Ru and RuAl phases. Oxidation that is caused by annealing atmospheres and elements diffused from substrates was investigated. The results indicated that the inward diffusion of O at 600 • C in a 1% O 2-99% Ar atmosphere was restricted by the formation of an amorphous Al-oxide sublayer, and inward diffusion of O at 800 • C in air was limited by the formation of a crystalline Al 2 O 3 scale. Additionally, the outward diffusion of elements from Inconel 617 penetrated the unoxidized parts of the 800 • C-annealed Ru-Al multilayers.

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Section: Methodsmentioning

confidence: 99%

Thermal Stability of Ru–Al Multilayered Thin Films on Inconel 617

Chen

Zheng

Jhang

2018

Metals

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“…For example, Ru-Al alloys have been applied for jet engine components, bond coats for thermal barrier coatings, corrosion-and oxidation-protective coatings, and electrodes [1,2], whereas Ta-Al alloys have been applied for sulfidation and oxidation-protective coatings [3][4][5], heater materials [12][13][14], and electromagnetic shielding [15]. A previous paper [16] evaluated the oxidation behavior of Ru-Al multilayer coatings in 1% O 2 -99% Ar at 400-800 • C. In our co-sputtering system [16][17][18][19][20][21], the plasma sources focused on a circular track but not the center of the substrate-holder; thus, a multilayer coating with cyclical gradient concentration formed, as the substrate-holder was rotated in a low speed of 1-7 rpm. Such multilayer coatings were constructed by alloy sublayers with continuous variation in compositions, but not monolithic sublayers of distinct elements.…”

Section: Introductionmentioning

confidence: 99%

Oxidation Behavior of Ta–Al Multilayer Coatings

Chen

Lin

2019

Coatings

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Ta-Al multilayer coatings were fabricated through cyclical gradient concentration deposition by direct current magnetron co-sputtering. The as-deposited coatings presented a multilayer structure in the growth direction. The oxidation behavior of the Ta-Al multilayer coatings was explored. The results specified that Ta-rich Ta-Al multilayer coatings demonstrated a restricted oxidation depth after annealing at 600 • C in 1% O 2 -99% Ar for up to 100 h. This was attributed to the preferential oxidation of Al, the formation of amorphous Al-oxide sublayers, and the maintenance of a multilayer structure. By contrast, Ta 2 O 5 formed after exhausting Al in the oxidation process in an ambient atmosphere at 600 • C which exhibited a crystalline Ta 2 O 5 -amorphous Al-oxide multilayer structure.

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“…Compared to the conventional transition metal aluminides, the B2‐type cubic Zr‐based compounds have high melting point. In addition, the Zr‐based compounds have excellent oxidation resistance due to the formation of ZrO 2 . For the B2‐type Zr‐based compounds, the thermodynamic models of Ru‐Zr system are investigated by David et al They have found that the B2‐type RuZr shows better thermodynamic stability.…”

Section: Introductionmentioning

confidence: 99%

The structural, mechanical, and thermodynamic properties of B2‐type TMZr (TM = Ru, Mo, Rh, Os, and Re) compounds from first‐principles calculations

Pan

2019

Int J of Quantum Chemistry

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The B2‐type cubic Zr‐based compounds are attractive advanced high‐temperature materials because of the strong and symmetrical bonds. However, the mechanical and thermodynamic properties of the B2‐type cubic Zr‐based compounds are not well understood. Here, we use the first‐principles calculations to investigate the structural, elastic modulus, ductility, and thermodynamic properties of TMZr (TM = Ru, Mo, Rh, Os, and Re) compounds. Two novel TMZr compounds, MoZr and ReZr, are first predicted by using the phonon dispersion and formation enthalpy, respectively. The results show that the B2‐type TMZr compounds not only exhibit high elastic modulus but also show better ductility due to the symmetrical TM‐Zr metallic bonds. In particular, the calculated elastic modulus of OsZr is larger than that of the other four TMZr compounds, indicating that the OsZr shows the strongest deformation resistance in five TMZr compounds. The calculated Θ D of RuZr is 328 K, which is larger than that of the other four TMZr compounds. The calculated phonon density of state shows that the high‐temperature thermodynamic properties of TMZr derive from the vibration of Zr atom. Therefore, our work predicts that the B2‐type OsZr is an attractive high‐temperature structural material.

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Internally Oxidized Ru–Zr Multilayer Coatings

Cited by 8 publications

References 35 publications

Thermal Stability of Ru–Al Multilayered Thin Films on Inconel 617

Thermal Stability of Ru–Al Multilayered Thin Films on Inconel 617

Oxidation Behavior of Ta–Al Multilayer Coatings

The structural, mechanical, and thermodynamic properties of B2‐type TMZr (TM = Ru, Mo, Rh, Os, and Re) compounds from first‐principles calculations

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