The VI International Conference on Information Technology and Nanotechnology (ITNT-2020: http://itnt-conf.org/) was held in Samara, Russia, May 26-29, 2020, at Samara National Research University and Image Processing Systems Institute of RAS. Due to the COVID-19 pandemic, the Conference has to be moved to a virtual regime. Despite the new format, the ITNT-2020 gathered a large quorum of participants, who presented more than 500 talks in different actual topics of modern science. These proceedings of the VI International Conference on Information Technology and Nanotechnology contain 120 papers which have been peer-reviewed by special Committee of Editors to guarantee high quality and novelty of presented research. The topics discussed include computer optics, nanophotonics, mathematical modeling of physico-technical processes and systems.