2008 International Conference on Simulation of Semiconductor Processes and Devices 2008
DOI: 10.1109/sispad.2008.4648244
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Interpretation of laser absorption measurements on 4H-SiC bipolar diodes by numerical simulation

Abstract: The interpretation and evaluation of free carrier absorption experiments on SiC devices is essentially supported by computer simulations of the measurement process, which exploits the physical effect that the light absorption coefficient in a semiconductor depends on the electron and hole concentrations. Hence, the attenuation of a laser beam transmitted through a sample is an integral function of the local charge carrier density along the optical path. We investigated time-resolved absorption profiles in 4H-S… Show more

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Cited by 6 publications
(6 citation statements)
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“…The optical properties of semiconductor devices are temperature dependent. Thus many optical temperature indicators can be found, such as luminescence, Raman effect, refraction index [2], reflectance [3] or laser deflection [4][5][6]. The authors of power electronics studies often use the variation of infrared (IR) radiation with temperature: local infrared sensors [7][8][9][10][11], optical fibers [12][13], infrared microscope [14][15] and infrared camera [7,[19][20][21][22][23].…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…The optical properties of semiconductor devices are temperature dependent. Thus many optical temperature indicators can be found, such as luminescence, Raman effect, refraction index [2], reflectance [3] or laser deflection [4][5][6]. The authors of power electronics studies often use the variation of infrared (IR) radiation with temperature: local infrared sensors [7][8][9][10][11], optical fibers [12][13], infrared microscope [14][15] and infrared camera [7,[19][20][21][22][23].…”
Section: Introductionmentioning
confidence: 99%
“…The infrared microscope [14] and the 2D radiometry [8,9] also allow for thermal mapping of the semiconductor device. In addition, the laser deflection technique [4][5][6] can be used to measure the temperature gradients directly inside the power semi-conductor. This possibility can be very interesting in order to validate electro-thermal models.…”
Section: Introductionmentioning
confidence: 99%
“…There are various techniques for thermal mapping based on the use of an IR sensor [36][37][38][39][40], IR microscope [41], 2D radiometry [41,42], and the laser deflection technique [43][44][45], while fiber optic [46][47][48] and the IR camera [49][50][51][52][53][54] can both be used to obtain a thermal mapping or the JT value. In the following, the aforementioned optical techniques are briefly discussed.…”
Section: Optical Methodsmentioning
confidence: 99%
“…The use of optical fiber as a CM method for the power modules has been discussed in very few works [46][47][48]. It is worth underlining that this CM method can be used without removing the dielectric gel on the power module surface, and the JT can be measured by placing the fiber optic cable in direct contact with the power chip.…”
Section: Optical Fibersmentioning
confidence: 99%
“…The methods can be divided into three main categories which are electrical, optical and physically contacting. Optical methods such as measurement by thermal camera involve the measurement of temperature-dependent optical parameters like infra-red radiation [123,124,125], luminescence and laser deflection [126,127,128]. Physically contacting methods involve direct contact of the measurement instrument with the semiconductor die.…”
Section: : Opposition Setup For Characterising Switching Losses Of Half-bridgementioning
confidence: 99%