2001
DOI: 10.1364/ol.26.000798
|View full text |Cite
|
Sign up to set email alerts
|

Intracavity control of a 200-W continuous-wave Nd:YAG laser by a micromachined deformable mirror

Abstract: A silicon micromachined membrane deformable mirror with a diameter of 10 mm, reflectivity of better than 99.8%, and a surface deflection range of 3mum has been used for intracavity control of an industrial 200-W cw Nd:YAG laser. When it was placed in the resonator, the mirror demonstrated continuous (more than 40-h) stable operation under an ~550-W cw optical load, with beam diameters in the range 3-6 mm. Periodic modulation of the curvature of the deformable mirror with a frequency of 250 Hz produced quick sw… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

1
14
0

Year Published

2002
2002
2018
2018

Publication Types

Select...
4
4
2

Relationship

2
8

Authors

Journals

citations
Cited by 38 publications
(15 citation statements)
references
References 8 publications
1
14
0
Order By: Relevance
“…The maximum specified surface deflection range was 4µm at 290V, however, in these experiments the maximum actuator voltage activated was intentionally limited to 200V. Similar mirrors have been demonstrated at optical power densities of 2.6kW/cm 2 (intracavity) and 11kW/cm 2 (extracavity) without damage [9].…”
Section: Micro-machined Deformable Mirrorsupporting
confidence: 57%
“…The maximum specified surface deflection range was 4µm at 290V, however, in these experiments the maximum actuator voltage activated was intentionally limited to 200V. Similar mirrors have been demonstrated at optical power densities of 2.6kW/cm 2 (intracavity) and 11kW/cm 2 (extracavity) without damage [9].…”
Section: Micro-machined Deformable Mirrorsupporting
confidence: 57%
“…Low absorption ensures suppression of thermal heating, which can cause uncontrolled deformation of the mirror. Such an intracavity mirror was shown to be effective at 550 W in continuous stable regime 16 . Maximum deformation of the mirror is ~4 μm at the threshold voltage of 280 V. As it was shown above, this deformation should be sufficient for the task in hand.…”
Section: Results Of the Experimental Aprobationmentioning
confidence: 99%
“…Nevertheless, occasional examples of intracavity laser application have been given. 10 In contrast, piezoelectrically activated DMs are widespread in the field of laser beam shaping. [11][12][13] From their inception, unimorph (and bimorph) DMs have been applied to the compensation for thermal lensing, 14,15 and this is still the case.…”
Section: Introductionmentioning
confidence: 99%