Intrinsically tunable bulk acoustic wave resonators based on sol-gel grown PMN-PT films

Vorobiev, Andrei; Spreitzer, Matjaž; Veber, Asja; Suvorov, Danilo; Gevorgian, Spartak

doi:10.1063/1.4893179

Journal of Applied Physics

2014

DOI: 10.1063/1.4893179

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Intrinsically tunable bulk acoustic wave resonators based on sol-gel grown PMN-PT films

Andrei Vorobiev

Matjaž Spreitzer

Asja Veber

et al.

Abstract: Intrinsically tunable bulk acoustic wave resonators, based on sol-gel 0.70Pb(Mg 1/3 Nb 2/3)O 3-0.30PbTiO 3 (PMN-PT) thin films, with high effective electromechanical coupling coefficient of 13% and tunability of the series resonance frequency up to 4.0% are fabricated and characterized. The enhanced electroacoustic properties of the PMN-PT resonators are attributed to the mechanism of polarization rotation occurring in the region of the morphotropic phase boundary. Electroacoustic performance of the PMN-PT res… Show more

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Cited by 5 publications

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Frequency Tunable Film Bulk Acoustic Resonator Integrating PMN‐PT/FSMA Multiferroic Heterostructure for Flexible MEMS

Arora,

Kaur

2024

Adv Materials Technologies

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Frequency tunable flexible piezo resonators exhibit significant potential for technological advances in wearable magnetic field sensing, futuristic wireless telecommunication devices, and flexible micro‐electromechanical systems. This study presents a multifunctional and flexible 0.67Pb(Mg1/3Nb2/3)O3−0.33PbTiO3(PMN‐PT)/Ni50Mn35In15 (Ni‐Mn‐In) multiferroic heterostructure‐based bulk acoustic wave (BAW) resonator fabricated over Kapton substrate. The fundamental resonance frequency (fR = 5.31 GHz) of the resonator is tunable with magnetic and electric fields. A significant change in resonance frequency (ΔfR) of 405 MHz has been achieved with 3.37 Hz nT−1 sensitivity using a direct current (DC) magnetic field of 1200 Oe, attributed to the delta‐E effect. The resonator displays a significant magnetic field tunability of 8.83%. Additionally, a substantial ΔfR of 360 MHz, 36 Hz µV−1 sensitivity and 6.78% tunability is attained with 10 V of DC bias voltage. The impact of magnetic field and DC bias voltage on the acoustic characteristics have been studied by fitting the resonance frequency curves with an equivalent modified Butterworth‐Van Dyke model. The fabricated BAW resonator exhibits outstanding flexibility with no discernible change in fR up to 2000 bending cycles. Such PMN‐PT/Ni‐Mn‐In‐based multiferroic BAW resonators displaying magnetic and electric field tunability are propitious for next‐generation flexible electronics and magnetic field sensors.

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Frequency Tunable Film Bulk Acoustic Resonator Integrating PMN‐PT/FSMA Multiferroic Heterostructure for Flexible MEMS

Arora,

Kaur

2024

Adv Materials Technologies

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Epitaxial ferroelectric 0.3Pb(In1/2Nb1/2)O3–0.38Pb(Mg1/3Nb2/3)O3–0.32PbTiO3 thin films grown on (110)-oriented MgO substrates

Yao

Mamun

et al. 2015

Thin Solid Films

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Magnetically and Electrically Tunable Pb(Mg_1/3Nb_2/3)O₃–PbTiO₃/Ferromagnetic Shape Memory Alloy Nanolayered Film-Based Acoustic Wave Resonator for Flexible Microelectromechanical Systems

Arora,

Kaur

2024

ACS Appl. Nano Mater.

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Flexible and tunable bulk acoustic wave (BAW) resonators are propitious for technical breakthroughs in flexible microelectromechanical systems, next-generation wireless telecommunication devices, and wearable magnetic field sensors. Here, we report a highly flexible and multifaceted film BAW resonator comprising piezoelectric PMN−PT thin film sandwiched between magnetostrictive Ni−Mn−In electrodes and grown on flexible Ni foil. The fundamental resonance frequency (f R ) obtained at 5.31 GHz is tunable with both magnetic and electric fields. A considerable upshift in f R ∼ 450 MHz and sensitivity of ∼3.75 Hz/nT is attained with 1200 Oe DC magnetic field. This shift in f R is attributed to the strain-mediated magnetoelectric coupling in the fabricated resonator. A noteworthy tunability of 9.6% is obtained with a magnetic field. However, an appreciable down-shift of ∼360 MHz in f R is attained with 10 V DC bias. The electric field sensitivity and tunability are obtained as ∼36 Hz/μV and 6.8%, respectively. Additionally, the experimental resonance frequency curves are fitted with an equivalent modified Butterworth−Van Dyke model. The impact of magnetic field and DC bias voltage on resonator parameters, i.e., quality factor, coupling coefficient, figure of merit, and acoustic velocity, is thoroughly investigated. The flexible BAW resonator shows no apparent change in f R up to 3000 bending cycles. The proposed flexible and tunable thin film BAW resonator is promising for futuristic flexible multifunctional MEMS, tunable resonators, and magnetic field sensors.

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Intrinsically tunable bulk acoustic wave resonators based on sol-gel grown PMN-PT films

Cited by 5 publications

References 29 publications

Frequency Tunable Film Bulk Acoustic Resonator Integrating PMN‐PT/FSMA Multiferroic Heterostructure for Flexible MEMS

Frequency Tunable Film Bulk Acoustic Resonator Integrating PMN‐PT/FSMA Multiferroic Heterostructure for Flexible MEMS

Epitaxial ferroelectric 0.3Pb(In1/2Nb1/2)O3–0.38Pb(Mg1/3Nb2/3)O3–0.32PbTiO3 thin films grown on (110)-oriented MgO substrates

Magnetically and Electrically Tunable Pb(Mg_1/3Nb_2/3)O₃–PbTiO₃/Ferromagnetic Shape Memory Alloy Nanolayered Film-Based Acoustic Wave Resonator for Flexible Microelectromechanical Systems

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Intrinsically tunable bulk acoustic wave resonators based on sol-gel grown PMN-PT films

Cited by 5 publications

References 29 publications

Frequency Tunable Film Bulk Acoustic Resonator Integrating PMN‐PT/FSMA Multiferroic Heterostructure for Flexible MEMS

Frequency Tunable Film Bulk Acoustic Resonator Integrating PMN‐PT/FSMA Multiferroic Heterostructure for Flexible MEMS

Epitaxial ferroelectric 0.3Pb(In1/2Nb1/2)O3–0.38Pb(Mg1/3Nb2/3)O3–0.32PbTiO3 thin films grown on (110)-oriented MgO substrates

Magnetically and Electrically Tunable Pb(Mg1/3Nb2/3)O3–PbTiO3/Ferromagnetic Shape Memory Alloy Nanolayered Film-Based Acoustic Wave Resonator for Flexible Microelectromechanical Systems

Contact Info

Product

Resources

About

Magnetically and Electrically Tunable Pb(Mg_1/3Nb_2/3)O₃–PbTiO₃/Ferromagnetic Shape Memory Alloy Nanolayered Film-Based Acoustic Wave Resonator for Flexible Microelectromechanical Systems