Introduction of Zr in nanometric periodic Mg/Co multilayers

Guen, Karine Le; Hu, Min; André, Jean‐Michel; Jonnard, Philippe; Zhou, Sika; Li, H.-C.; Zhu, Jingtao; Wang, Z.-S.; Mahne, Nicola; Giglia, Angela; Nannarone, Stefano

doi:10.1007/s00339-010-6093-2

Cited by 21 publications

(19 citation statements)

References 13 publications

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“…5(c) and 5(d). A bi-layer stack of the same composition has already been used to fit the extreme UV reflectivity curves of a similar system, however with much thicker Mg layers (13 nm), designed to work around 25 nm (Le Guen et al, 2011a). Let us note that regarding the Mg K curve, there is no significant difference between the simulations with a tri-or bilayer system, as the Mg atoms are not involved in interfacial diffusion.…”

Section: Resultsmentioning

confidence: 99%

X-ray fluorescence induced by standing waves in the grazing-incidence and grazing-exit modes: study of the Mg–Co–Zr system

Yuan

Guen

et al. 2015

J Synchrotron Radiat

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The characterization of Mg-Co-Zr tri-layer stacks using X-ray fluorescence induced by X-ray standing waves, in both the grazing-incidence (GI) and the grazing-exit (GE) modes, is presented. The introduction of a slit in the direction of the detector improves the angular resolution by a factor of two and significantly improves the sensitivity of the technique for the chemical characterization of the buried interfaces. By observing the intensity variations of the Mg Kα and Co Lα characteristic emissions as a function of the incident (GI mode) or detection (GE mode) angle, it is shown that the interfaces of the Si/[Mg/Co/Zr] × 30 multilayer are abrupt, whereas in the Si/[Mg/Zr/Co] × 30 multilayer a strong intermixing occurs at the Co-on-Zr interfaces. An explanation of this opposite behavior of the Co-on-Zr and Zr-on-Co interfaces is given by the calculation of the mixing enthalpies of the Co-Mg, Co-Zr and Mg-Zr systems, which shows that the Co-Zr system presents a negative value and the other two systems present positive values. Together with the difference of the surface free energies of Zr and Co, this leads to the Mg/Zr/Co system being considered as a Mg/CoxZry bi-layer stack, with x/y estimated around 3.5.

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Section: Resultsmentioning

confidence: 99%

X-ray fluorescence induced by standing waves in the grazing-incidence and grazing-exit modes: study of the Mg–Co–Zr system

Yuan

Guen

et al. 2015

J Synchrotron Radiat

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“…As established earlier (Seely et al, 2004;Le Guen et al, 2011), in the wavelength range of interest, 17-22 nm, the refraction indices of some materials derived from the approach developed in Henke et al (1993) may be not accurate enough.…”

Section: Al/zr Gratingmentioning

confidence: 94%

Nonlinear continuum growth model of multiscale reliefs as applied to rigorous analysis of multilayer short-wave scattering intensity. I. Gratings

Goray

Lubov

2013

J Appl Cryst

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It is shown that taking into proper account certain terms in the nonlinear continuum equation of thin-film growth makes it applicable to the simulation of the surface of multilayer gratings with large boundary profile heights and/or gradient jumps. The proposed model describes smoothing and displacement of Mo/Si and Al/Zr boundaries of gratings grown on Si substrates with a blazed groove profile by magnetron sputtering and ion-beam deposition. Computer simulation of the growth of multilayer Mo/Si and Al/Zr gratings has been conducted. Absolute diffraction efficiencies of Mo/Si and Al/Zr gratings in the extreme UV range have been found within the framework of boundary integral equations applied to the calculated boundary profiles. It has been demonstrated that the integrated approach to the calculation of boundary profiles and of the intensity of short-wave scattering by multilayer gratings developed here opens up a way to perform studies comparable in accuracy to measurements with synchrotron radiation, at least for known materials and growth techniques.

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“…This was deduced from nuclear magnetic resonance and X-ray emission spectroscopies giving the chemical states of the Co and Mg atoms, respectively. [51][52][53] Using these results and the indirect method, 10 49 we simulate and fit the Kossel curves of Mg/Co/Zr considered as a tri-layer system, while for the Mg/Zr/Co system it is necessary to model a Mg/Co x Zr y bilayer system with x/y = 3.5. This is illustrated in Figure 3 for the Co L emission of Mg/Zr/Co.…”

Section: Photon Excitationmentioning

confidence: 99%

Kossel Effect in Periodic Multilayers

Guen

André

et al. 2019

j nanosci nanotechnol

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The Kossel effect is the diffraction by a periodically structured medium, of the characteristic X-ray radiation emitted by the atoms of the medium. We show that multilayers designed for X-ray optics applications are convenient periodic systems to use in order to produce the Kossel effect, modulating the intensity emitted by the sample in a narrow angular range defined by the Bragg angle. We also show that excitation can be done by using photons (X-rays), electrons or protons (or charged particles), under near normal or grazing incident geometries, which makes the method relatively easy to implement. The main constraint comes from the angular resolution necessary for the detection of the emitted radiation. This leads to small solid angles of detection and long acquisition times to collect data with sufficient statistical significance. Provided this difficulty is overcome, the comparison or fit of the experimental Kossel curves, i.e., the angular distributions of the intensity of an emitted radiation of one of the element of the periodic stack, with the simulated curves enables getting information on the depth distribution of the elements throughout the multilayer. Thus the same kind of information obtained from the more widespread method of X-ray standing wave induced fluorescence used to characterize stacks of nanometer period, can be obtained using the Kossel effect.

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Introduction of Zr in nanometric periodic Mg/Co multilayers

Cited by 21 publications

References 13 publications

X-ray fluorescence induced by standing waves in the grazing-incidence and grazing-exit modes: study of the Mg–Co–Zr system

X-ray fluorescence induced by standing waves in the grazing-incidence and grazing-exit modes: study of the Mg–Co–Zr system

Nonlinear continuum growth model of multiscale reliefs as applied to rigorous analysis of multilayer short-wave scattering intensity. I. Gratings

Kossel Effect in Periodic Multilayers

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